JPS53110362A - Etching method - Google Patents

Etching method

Info

Publication number
JPS53110362A
JPS53110362A JP2436377A JP2436377A JPS53110362A JP S53110362 A JPS53110362 A JP S53110362A JP 2436377 A JP2436377 A JP 2436377A JP 2436377 A JP2436377 A JP 2436377A JP S53110362 A JPS53110362 A JP S53110362A
Authority
JP
Japan
Prior art keywords
type substance
etching method
longer
nozzle
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2436377A
Other languages
Japanese (ja)
Other versions
JPS5953655B2 (en
Inventor
Minoru Nemoto
Kadode Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2436377A priority Critical patent/JPS5953655B2/en
Publication of JPS53110362A publication Critical patent/JPS53110362A/en
Publication of JPS5953655B2 publication Critical patent/JPS5953655B2/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To secure an alternate shifting of the longer center line of the nozzle manifold group provided in the longer direction at the upper and the lower parts of a belt-type substance by about 1/4 the nozzle space when a metal band-type substance which contains the protective film possessing the slender aperture coated on the surface is etched in the etching tank.
COPYRIGHT: (C)1978,JPO&Japio
JP2436377A 1977-03-08 1977-03-08 Etching method Expired JPS5953655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2436377A JPS5953655B2 (en) 1977-03-08 1977-03-08 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2436377A JPS5953655B2 (en) 1977-03-08 1977-03-08 Etching method

Publications (2)

Publication Number Publication Date
JPS53110362A true JPS53110362A (en) 1978-09-27
JPS5953655B2 JPS5953655B2 (en) 1984-12-26

Family

ID=12136105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2436377A Expired JPS5953655B2 (en) 1977-03-08 1977-03-08 Etching method

Country Status (1)

Country Link
JP (1) JPS5953655B2 (en)

Also Published As

Publication number Publication date
JPS5953655B2 (en) 1984-12-26

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