JPS531082A - Charged particle analyzer - Google Patents

Charged particle analyzer

Info

Publication number
JPS531082A
JPS531082A JP6654176A JP6654176A JPS531082A JP S531082 A JPS531082 A JP S531082A JP 6654176 A JP6654176 A JP 6654176A JP 6654176 A JP6654176 A JP 6654176A JP S531082 A JPS531082 A JP S531082A
Authority
JP
Japan
Prior art keywords
charged particle
particle analyzer
make
coaxial
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6654176A
Other languages
Japanese (ja)
Other versions
JPS5830695B2 (en
Inventor
Kiyoshi Ishikawa
Katsuhisa Usami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51066541A priority Critical patent/JPS5830695B2/en
Priority to US05/762,719 priority patent/US4126782A/en
Priority to GB3924/77A priority patent/GB1533526A/en
Priority to DE2705430A priority patent/DE2705430C3/en
Publication of JPS531082A publication Critical patent/JPS531082A/en
Publication of JPS5830695B2 publication Critical patent/JPS5830695B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To raise detecting accuracy and make operation easy for coaxial type analyzer which takes secondary signal of charged particle radiated from specimen surface out to coaxial direction, by utilizing characteristic of deflecting electrode as to make detecting solid angle of signal possibly be taken largely.
JP51066541A 1976-02-09 1976-06-09 charged particle analyzer Expired JPS5830695B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP51066541A JPS5830695B2 (en) 1976-06-09 1976-06-09 charged particle analyzer
US05/762,719 US4126782A (en) 1976-02-09 1977-01-26 Electrostatic charged-particle analyzer
GB3924/77A GB1533526A (en) 1976-02-09 1977-01-31 Electro-static charged particle analyzers
DE2705430A DE2705430C3 (en) 1976-02-09 1977-02-09 Electrostatic analyzer for charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51066541A JPS5830695B2 (en) 1976-06-09 1976-06-09 charged particle analyzer

Publications (2)

Publication Number Publication Date
JPS531082A true JPS531082A (en) 1978-01-07
JPS5830695B2 JPS5830695B2 (en) 1983-06-30

Family

ID=13318855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51066541A Expired JPS5830695B2 (en) 1976-02-09 1976-06-09 charged particle analyzer

Country Status (1)

Country Link
JP (1) JPS5830695B2 (en)

Also Published As

Publication number Publication date
JPS5830695B2 (en) 1983-06-30

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