JPS53106170A - Controlling apparatus for flow rate assembly for flow rate senser and calibrating method thereof - Google Patents
Controlling apparatus for flow rate assembly for flow rate senser and calibrating method thereofInfo
- Publication number
- JPS53106170A JPS53106170A JP2080178A JP2080178A JPS53106170A JP S53106170 A JPS53106170 A JP S53106170A JP 2080178 A JP2080178 A JP 2080178A JP 2080178 A JP2080178 A JP 2080178A JP S53106170 A JPS53106170 A JP S53106170A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- senser
- controlling apparatus
- calibrating method
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
- G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N2030/022—Column chromatography characterised by the kind of separation mechanism
- G01N2030/025—Gas chromatography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/28—Control of physical parameters of the fluid carrier
- G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7784—Responsive to change in rate of fluid flow
- Y10T137/7787—Expansible chamber subject to differential pressures
- Y10T137/7788—Pressures across fixed choke
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/772,179 US4096746A (en) | 1977-02-25 | 1977-02-25 | Flow controller-flow sensor assembly for gas chromatographs and the like |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53106170A true JPS53106170A (en) | 1978-09-14 |
JPS6250762B2 JPS6250762B2 (US20100223739A1-20100909-C00005.png) | 1987-10-27 |
Family
ID=25094209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2080178A Granted JPS53106170A (en) | 1977-02-25 | 1978-02-24 | Controlling apparatus for flow rate assembly for flow rate senser and calibrating method thereof |
Country Status (4)
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0442053A (ja) * | 1990-06-07 | 1992-02-12 | Yamatake Honeywell Co Ltd | ガスクロマトグラフ |
JP2008108277A (ja) * | 2007-12-28 | 2008-05-08 | Horiba Stec Co Ltd | 集積タイプのマスフローコントローラ |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE421349B (sv) * | 1977-12-16 | 1981-12-14 | Graende Per Olof | Flodesmetare for registrering av verkligt forlopp hos pulserade vetskefloden |
US4212200A (en) * | 1978-08-14 | 1980-07-15 | Transformateurs Bc And Effa | Instantaneous flow meter for automobile vehicles |
FR2439386A2 (fr) * | 1978-10-20 | 1980-05-16 | Effa Etudes Sarl | Debitmetre instantane |
FR2459457A1 (fr) * | 1979-06-15 | 1981-01-09 | Cricket Sa | Dispositif de mesure et de controle de debits gazeux |
FI73315C (fi) * | 1984-06-15 | 1987-09-10 | Nokia Oy Ab | Kalibreringssystem foer kalibrering av massastroemreglerare. |
WO1988005159A1 (en) * | 1987-01-08 | 1988-07-14 | Skoglund, Paul, K. | High pressure flow controller and flowmeter device |
US4821557A (en) * | 1988-03-08 | 1989-04-18 | Arkla, Inc. | Method and apparatus for determining the accuracy of a gas flow meter |
US5363689A (en) * | 1992-09-11 | 1994-11-15 | Intertech Development Company | Calibration device for leak detecting instruments |
US5329966A (en) * | 1993-03-08 | 1994-07-19 | Vici Metronics Incorporated | Gas flow controller |
US5313980A (en) * | 1993-04-06 | 1994-05-24 | Carlson Bengt A | Method of and valve for controlling flow in a hydronic system |
US5524473A (en) * | 1995-01-01 | 1996-06-11 | Haskell; Weston W. | Gas chromatograph flow calibrator |
US5545252A (en) * | 1995-03-01 | 1996-08-13 | The Perkin-Elmer Corporation | Flow regulation in gas chromatograph |
DE19703452A1 (de) * | 1996-02-29 | 1997-09-04 | Hewlett Packard Co | System zum schnittstellenmäßigen Verbinden von Probenvorbereitungsgeräten mit einem Chromatograph |
US5760301A (en) * | 1997-01-09 | 1998-06-02 | Precision Medical, Inc. | Flow meter for a gas pressure regulator |
US5911219A (en) * | 1997-04-18 | 1999-06-15 | Aylsworth; Alonzo C. | Therapeutic gas flow meter and monitor |
US6026849A (en) * | 1998-06-01 | 2000-02-22 | Thordarson; Petur | High pressure regulated flow controller |
US6389364B1 (en) * | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
US6460420B1 (en) * | 2000-04-13 | 2002-10-08 | Sandia National Laboratories | Flowmeter for pressure-driven chromatography systems |
US6443174B2 (en) | 2000-07-08 | 2002-09-03 | Daniel T. Mudd | Fluid mass flow control valve and method of operation |
WO2002008845A1 (en) | 2000-07-25 | 2002-01-31 | Fugasity Corporation | Small internal volume fluid mass flow control apparatus |
US6698183B1 (en) | 2000-09-11 | 2004-03-02 | Petur Thordarson | Hydrogen motor |
US20050126155A1 (en) * | 2000-09-11 | 2005-06-16 | Petur Thordarson | Hydrogen motor |
AU2001284386A1 (en) | 2000-09-11 | 2002-03-22 | Petur Thordarson | Hydrogen motor |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
US6467505B1 (en) | 2000-10-11 | 2002-10-22 | Flowmatrix Inc. | Variable pressure regulated flow controllers |
US6832628B2 (en) * | 2000-10-11 | 2004-12-21 | Flowmatrix, Inc. | Variable pressure regulated flow controllers |
US6564824B2 (en) | 2001-04-13 | 2003-05-20 | Flowmatrix, Inc. | Mass flow meter systems and methods |
CN1606721A (zh) * | 2001-10-12 | 2005-04-13 | 霍里巴斯特克公司 | 制造和使用质量流量设备的系统和方法 |
US20050229976A1 (en) * | 2004-04-16 | 2005-10-20 | Yao-Hwan Kao | Adjustable rinse flow in semiconductor processing |
DE202008005729U1 (de) * | 2008-04-24 | 2009-09-03 | systec Controls Meß- und Regeltechnik GmbH | Durchflussmesser |
WO2010045246A1 (en) * | 2008-10-14 | 2010-04-22 | Circor Instrumentation Technologies, Inc. | Method and apparatus for low powered and/or high pressure flow control |
US20110226354A1 (en) * | 2010-03-17 | 2011-09-22 | Petur Thordarson | Flow Controller |
US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
WO2013134476A1 (en) | 2012-03-07 | 2013-09-12 | Waters Technologies Corporation | Pressure related hysteresis manipulation in a pressurized flow system |
WO2014040002A2 (en) * | 2012-09-10 | 2014-03-13 | Mudd Daniel T | Pressure based mass flow controller |
GB2519964A (en) | 2013-11-01 | 2015-05-13 | Linde Aktiengesellshcaft | Apparatus and method for detecting health deterioration |
US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
US11899477B2 (en) | 2021-03-03 | 2024-02-13 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1699676A (en) * | 1920-11-19 | 1929-01-22 | Doherty Res Co | Fluid-controlling mechanism |
US1640842A (en) * | 1925-03-11 | 1927-08-30 | Walter A Loomis | Volume control |
US2182873A (en) * | 1936-07-06 | 1939-12-12 | William R King | Regulator valve |
US2711187A (en) * | 1952-08-21 | 1955-06-21 | Foxboro Co | Pneumatically operated control apparatus |
US2862162A (en) * | 1955-05-27 | 1958-11-25 | Honeywell Regulator Co | Force rebalancing servosystem |
US3078713A (en) * | 1959-01-15 | 1963-02-26 | Blaw Knox Co | Means for generating electric functions |
GB1080013A (en) * | 1963-05-10 | 1967-08-23 | Dehavilland Aircraft | Improvements in or relating to mass flow measuring apparatus |
US3410138A (en) * | 1966-04-15 | 1968-11-12 | Gen Signal Corp | Wide range flow meter |
US3792609A (en) * | 1971-05-10 | 1974-02-19 | Tylan Corp | Flow splitter |
DE2540223A1 (de) * | 1975-09-10 | 1977-03-24 | Bayer Ag | Mengenstrommessung, unabhaengig vom fuellgrad und rueckstau nach dem drosselprinzip |
-
1977
- 1977-02-25 US US05/772,179 patent/US4096746A/en not_active Expired - Lifetime
- 1977-11-22 GB GB4864277A patent/GB1541548A/en not_active Expired
- 1977-12-16 DE DE19772756178 patent/DE2756178A1/de active Granted
-
1978
- 1978-02-24 JP JP2080178A patent/JPS53106170A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0442053A (ja) * | 1990-06-07 | 1992-02-12 | Yamatake Honeywell Co Ltd | ガスクロマトグラフ |
JP2008108277A (ja) * | 2007-12-28 | 2008-05-08 | Horiba Stec Co Ltd | 集積タイプのマスフローコントローラ |
JP4505009B2 (ja) * | 2007-12-28 | 2010-07-14 | 株式会社堀場エステック | 集積タイプのマスフローコントローラ及びガス供給ライン |
Also Published As
Publication number | Publication date |
---|---|
DE2756178C2 (US20100223739A1-20100909-C00005.png) | 1988-07-21 |
GB1541548A (en) | 1979-03-07 |
JPS6250762B2 (US20100223739A1-20100909-C00005.png) | 1987-10-27 |
US4096746A (en) | 1978-06-27 |
DE2756178A1 (de) | 1978-08-31 |
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