JPS53101992A - Electrode forming method of micro-tuning fork type crystal vibrator - Google Patents

Electrode forming method of micro-tuning fork type crystal vibrator

Info

Publication number
JPS53101992A
JPS53101992A JP1652477A JP1652477A JPS53101992A JP S53101992 A JPS53101992 A JP S53101992A JP 1652477 A JP1652477 A JP 1652477A JP 1652477 A JP1652477 A JP 1652477A JP S53101992 A JPS53101992 A JP S53101992A
Authority
JP
Japan
Prior art keywords
fork type
micro
forming method
tuning fork
electrode forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1652477A
Other languages
Japanese (ja)
Inventor
Makoto Wakasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP1652477A priority Critical patent/JPS53101992A/en
Priority to US05/864,271 priority patent/US4252839A/en
Priority to GB54107/77A priority patent/GB1594980A/en
Publication of JPS53101992A publication Critical patent/JPS53101992A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To prevent deposition of metal films on the X face or Z face of the bottom of the groove of a vibrator and facilitate electrode formation by beforehand covering said face with a metal mask, in a low frequency micro-turning fork type vibrator whose resonance part X-direction sixe is less than 0.4mm.
JP1652477A 1976-12-29 1977-02-17 Electrode forming method of micro-tuning fork type crystal vibrator Pending JPS53101992A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1652477A JPS53101992A (en) 1977-02-17 1977-02-17 Electrode forming method of micro-tuning fork type crystal vibrator
US05/864,271 US4252839A (en) 1976-12-29 1977-12-27 Tuning fork-type quartz crystal vibrator and method of forming the same
GB54107/77A GB1594980A (en) 1976-12-29 1977-12-29 Tuning fork-type quartz crystal vibrator and method of forming the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1652477A JPS53101992A (en) 1977-02-17 1977-02-17 Electrode forming method of micro-tuning fork type crystal vibrator

Publications (1)

Publication Number Publication Date
JPS53101992A true JPS53101992A (en) 1978-09-05

Family

ID=11918653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1652477A Pending JPS53101992A (en) 1976-12-29 1977-02-17 Electrode forming method of micro-tuning fork type crystal vibrator

Country Status (1)

Country Link
JP (1) JPS53101992A (en)

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