JPS5413287A - Electrode thin film constituting method for crystal oscillator - Google Patents

Electrode thin film constituting method for crystal oscillator

Info

Publication number
JPS5413287A
JPS5413287A JP7858077A JP7858077A JPS5413287A JP S5413287 A JPS5413287 A JP S5413287A JP 7858077 A JP7858077 A JP 7858077A JP 7858077 A JP7858077 A JP 7858077A JP S5413287 A JPS5413287 A JP S5413287A
Authority
JP
Japan
Prior art keywords
thin film
crystal oscillator
film constituting
electrode thin
constituting method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7858077A
Other languages
Japanese (ja)
Inventor
Naoyuki Echigo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP7858077A priority Critical patent/JPS5413287A/en
Publication of JPS5413287A publication Critical patent/JPS5413287A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Abstract

PURPOSE:To increase the massproducibility of small sized oscillators excellent in the sharpness of resonance, by forming the electrode film having sufficient thickness also for the side surface of the oscillator by use of spacer and mask.
JP7858077A 1977-07-01 1977-07-01 Electrode thin film constituting method for crystal oscillator Pending JPS5413287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7858077A JPS5413287A (en) 1977-07-01 1977-07-01 Electrode thin film constituting method for crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7858077A JPS5413287A (en) 1977-07-01 1977-07-01 Electrode thin film constituting method for crystal oscillator

Publications (1)

Publication Number Publication Date
JPS5413287A true JPS5413287A (en) 1979-01-31

Family

ID=13665834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7858077A Pending JPS5413287A (en) 1977-07-01 1977-07-01 Electrode thin film constituting method for crystal oscillator

Country Status (1)

Country Link
JP (1) JPS5413287A (en)

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