JPS543488A - Electrode formation method for tuning-fork type crystal oscillator - Google Patents

Electrode formation method for tuning-fork type crystal oscillator

Info

Publication number
JPS543488A
JPS543488A JP6833277A JP6833277A JPS543488A JP S543488 A JPS543488 A JP S543488A JP 6833277 A JP6833277 A JP 6833277A JP 6833277 A JP6833277 A JP 6833277A JP S543488 A JPS543488 A JP S543488A
Authority
JP
Japan
Prior art keywords
tuning
type crystal
fork type
crystal oscillator
formation method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6833277A
Other languages
Japanese (ja)
Inventor
Makoto Wakasugi
Kazuo Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP6833277A priority Critical patent/JPS543488A/en
Publication of JPS543488A publication Critical patent/JPS543488A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Abstract

PURPOSE:To form an electrode to the micro-width oscillation branch by forming two pieces of electrodes on the main surface near the groove bottom at the resonance part of the tuning-fork type crystal oscillation bar through the evaporation using the metal mask containing the half-etching part.
JP6833277A 1977-06-09 1977-06-09 Electrode formation method for tuning-fork type crystal oscillator Pending JPS543488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6833277A JPS543488A (en) 1977-06-09 1977-06-09 Electrode formation method for tuning-fork type crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6833277A JPS543488A (en) 1977-06-09 1977-06-09 Electrode formation method for tuning-fork type crystal oscillator

Publications (1)

Publication Number Publication Date
JPS543488A true JPS543488A (en) 1979-01-11

Family

ID=13370766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6833277A Pending JPS543488A (en) 1977-06-09 1977-06-09 Electrode formation method for tuning-fork type crystal oscillator

Country Status (1)

Country Link
JP (1) JPS543488A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity

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