JPS5299765A - Transmission type electron lens - Google Patents

Transmission type electron lens

Info

Publication number
JPS5299765A
JPS5299765A JP1603976A JP1603976A JPS5299765A JP S5299765 A JPS5299765 A JP S5299765A JP 1603976 A JP1603976 A JP 1603976A JP 1603976 A JP1603976 A JP 1603976A JP S5299765 A JPS5299765 A JP S5299765A
Authority
JP
Japan
Prior art keywords
transmission type
type electron
electron lens
photograpah
magnification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1603976A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1603976A priority Critical patent/JPS5299765A/en
Publication of JPS5299765A publication Critical patent/JPS5299765A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable to observe or photograpah with a proper concentration of electron flow on the fluorescent plate or film by interlocking the movements of projection lens and the excitation of condenser lens even when there is 10 - 15 times of variation in magnification.
COPYRIGHT: (C)1977,JPO&Japio
JP1603976A 1976-02-18 1976-02-18 Transmission type electron lens Pending JPS5299765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1603976A JPS5299765A (en) 1976-02-18 1976-02-18 Transmission type electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1603976A JPS5299765A (en) 1976-02-18 1976-02-18 Transmission type electron lens

Publications (1)

Publication Number Publication Date
JPS5299765A true JPS5299765A (en) 1977-08-22

Family

ID=11905429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1603976A Pending JPS5299765A (en) 1976-02-18 1976-02-18 Transmission type electron lens

Country Status (1)

Country Link
JP (1) JPS5299765A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5504277B2 (en) * 2009-11-26 2014-05-28 株式会社日立ハイテクノロジーズ Scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5504277B2 (en) * 2009-11-26 2014-05-28 株式会社日立ハイテクノロジーズ Scanning electron microscope
US8921784B2 (en) 2009-11-26 2014-12-30 Hitachi High-Technologies Corporation Scanning electron microscope

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