JPS5299495A - Machining apparatus in use of ion beam - Google Patents
Machining apparatus in use of ion beamInfo
- Publication number
- JPS5299495A JPS5299495A JP1602776A JP1602776A JPS5299495A JP S5299495 A JPS5299495 A JP S5299495A JP 1602776 A JP1602776 A JP 1602776A JP 1602776 A JP1602776 A JP 1602776A JP S5299495 A JPS5299495 A JP S5299495A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- machining apparatus
- workpiece
- machining
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1602776A JPS5299495A (en) | 1976-02-18 | 1976-02-18 | Machining apparatus in use of ion beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1602776A JPS5299495A (en) | 1976-02-18 | 1976-02-18 | Machining apparatus in use of ion beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5299495A true JPS5299495A (en) | 1977-08-20 |
Family
ID=11905072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1602776A Pending JPS5299495A (en) | 1976-02-18 | 1976-02-18 | Machining apparatus in use of ion beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5299495A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123749A (ja) * | 1988-11-01 | 1990-05-11 | Seiko Instr Inc | 断面加工観察装置 |
JPH0792062A (ja) * | 1993-03-04 | 1995-04-07 | Natl Res Inst For Metals | 透過型電子顕微鏡用薄膜試料のその場作製および観察 方法並びにその装置 |
-
1976
- 1976-02-18 JP JP1602776A patent/JPS5299495A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123749A (ja) * | 1988-11-01 | 1990-05-11 | Seiko Instr Inc | 断面加工観察装置 |
JPH0792062A (ja) * | 1993-03-04 | 1995-04-07 | Natl Res Inst For Metals | 透過型電子顕微鏡用薄膜試料のその場作製および観察 方法並びにその装置 |
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