JPS5298067U - - Google Patents

Info

Publication number
JPS5298067U
JPS5298067U JP561176U JP561176U JPS5298067U JP S5298067 U JPS5298067 U JP S5298067U JP 561176 U JP561176 U JP 561176U JP 561176 U JP561176 U JP 561176U JP S5298067 U JPS5298067 U JP S5298067U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP561176U
Other languages
Japanese (ja)
Other versions
JPS5335640Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP561176U priority Critical patent/JPS5335640Y2/ja
Publication of JPS5298067U publication Critical patent/JPS5298067U/ja
Application granted granted Critical
Publication of JPS5335640Y2 publication Critical patent/JPS5335640Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mutual Connection Of Rods And Tubes (AREA)
JP561176U 1976-01-23 1976-01-23 Expired JPS5335640Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP561176U JPS5335640Y2 (enrdf_load_stackoverflow) 1976-01-23 1976-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP561176U JPS5335640Y2 (enrdf_load_stackoverflow) 1976-01-23 1976-01-23

Publications (2)

Publication Number Publication Date
JPS5298067U true JPS5298067U (enrdf_load_stackoverflow) 1977-07-23
JPS5335640Y2 JPS5335640Y2 (enrdf_load_stackoverflow) 1978-08-31

Family

ID=28466234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP561176U Expired JPS5335640Y2 (enrdf_load_stackoverflow) 1976-01-23 1976-01-23

Country Status (1)

Country Link
JP (1) JPS5335640Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010110868A (ja) * 2008-11-07 2010-05-20 Ulvac Japan Ltd 基板搬送装置
WO2011092929A1 (ja) * 2010-01-26 2011-08-04 株式会社フジキン 流体制御器および流量制御装置
JP2017221478A (ja) * 2016-06-16 2017-12-21 ホーチキ株式会社 放水銃装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010110868A (ja) * 2008-11-07 2010-05-20 Ulvac Japan Ltd 基板搬送装置
WO2011092929A1 (ja) * 2010-01-26 2011-08-04 株式会社フジキン 流体制御器および流量制御装置
US9163748B2 (en) 2010-01-26 2015-10-20 Fujikin Incorporated Fluid control device and flow rate control apparatus
DE112010005186B4 (de) 2010-01-26 2020-05-28 Fujikin Incorporated Fluidsteuervorrichtung und Volumenstromregelungseinrichtung
JP2017221478A (ja) * 2016-06-16 2017-12-21 ホーチキ株式会社 放水銃装置

Also Published As

Publication number Publication date
JPS5335640Y2 (enrdf_load_stackoverflow) 1978-08-31

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