JPS529508B2 - - Google Patents
Info
- Publication number
- JPS529508B2 JPS529508B2 JP9807272A JP9807272A JPS529508B2 JP S529508 B2 JPS529508 B2 JP S529508B2 JP 9807272 A JP9807272 A JP 9807272A JP 9807272 A JP9807272 A JP 9807272A JP S529508 B2 JPS529508 B2 JP S529508B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807272A JPS529508B2 (https=) | 1972-10-02 | 1972-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807272A JPS529508B2 (https=) | 1972-10-02 | 1972-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4967575A JPS4967575A (https=) | 1974-07-01 |
| JPS529508B2 true JPS529508B2 (https=) | 1977-03-16 |
Family
ID=14210128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9807272A Expired JPS529508B2 (https=) | 1972-10-02 | 1972-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529508B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341075B2 (https=) * | 1974-12-27 | 1978-10-31 | ||
| JPS52120562A (en) * | 1976-04-02 | 1977-10-11 | Mitsubishi Electric Corp | Removing method of micro-particle |
| JPS53120377A (en) * | 1977-03-30 | 1978-10-20 | Nec Corp | Laser machining apparatus for correction of photo masks |
| ATE80955T1 (de) * | 1984-06-20 | 1992-10-15 | Gould Inc | Laserverfahren zur photomaskenreparatur. |
-
1972
- 1972-10-02 JP JP9807272A patent/JPS529508B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4967575A (https=) | 1974-07-01 |