JPS5341075B2 - - Google Patents
Info
- Publication number
- JPS5341075B2 JPS5341075B2 JP14864574A JP14864574A JPS5341075B2 JP S5341075 B2 JPS5341075 B2 JP S5341075B2 JP 14864574 A JP14864574 A JP 14864574A JP 14864574 A JP14864574 A JP 14864574A JP S5341075 B2 JPS5341075 B2 JP S5341075B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14864574A JPS5341075B2 (https=) | 1974-12-27 | 1974-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14864574A JPS5341075B2 (https=) | 1974-12-27 | 1974-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5176978A JPS5176978A (https=) | 1976-07-03 |
| JPS5341075B2 true JPS5341075B2 (https=) | 1978-10-31 |
Family
ID=15457418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14864574A Expired JPS5341075B2 (https=) | 1974-12-27 | 1974-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5341075B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55157537U (https=) * | 1979-04-28 | 1980-11-12 | ||
| ATE80955T1 (de) * | 1984-06-20 | 1992-10-15 | Gould Inc | Laserverfahren zur photomaskenreparatur. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS529508B2 (https=) * | 1972-10-02 | 1977-03-16 |
-
1974
- 1974-12-27 JP JP14864574A patent/JPS5341075B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5176978A (https=) | 1976-07-03 |