JPS529505B2 - - Google Patents
Info
- Publication number
- JPS529505B2 JPS529505B2 JP6410472A JP6410472A JPS529505B2 JP S529505 B2 JPS529505 B2 JP S529505B2 JP 6410472 A JP6410472 A JP 6410472A JP 6410472 A JP6410472 A JP 6410472A JP S529505 B2 JPS529505 B2 JP S529505B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6410472A JPS529505B2 (enrdf_load_stackoverflow) | 1972-06-28 | 1972-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6410472A JPS529505B2 (enrdf_load_stackoverflow) | 1972-06-28 | 1972-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4924367A JPS4924367A (enrdf_load_stackoverflow) | 1974-03-04 |
| JPS529505B2 true JPS529505B2 (enrdf_load_stackoverflow) | 1977-03-16 |
Family
ID=13248424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6410472A Expired JPS529505B2 (enrdf_load_stackoverflow) | 1972-06-28 | 1972-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529505B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS594848B2 (ja) * | 1975-05-21 | 1984-02-01 | 日本電信電話株式会社 | 非晶質カルコゲナイドガラス薄膜を用いるフオトエツチングの方法 |
| JPS51136286A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Ion implantation using noncrystalline carchogenide thin film as mask |
| JPS51136287A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Photo mask using non-crystalline carchognide glass thin film |
| JPS5219972A (en) * | 1975-08-08 | 1977-02-15 | Nippon Telegr & Teleph Corp <Ntt> | Non-crystal semiconductor master manufacturing process |
| JPS5230507A (en) * | 1975-09-04 | 1977-03-08 | Fuji Kagaku Shikogyo | Typewritter ribbon |
-
1972
- 1972-06-28 JP JP6410472A patent/JPS529505B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4924367A (enrdf_load_stackoverflow) | 1974-03-04 |