JPS528782A - Charge coupled device process - Google Patents

Charge coupled device process

Info

Publication number
JPS528782A
JPS528782A JP8505075A JP8505075A JPS528782A JP S528782 A JPS528782 A JP S528782A JP 8505075 A JP8505075 A JP 8505075A JP 8505075 A JP8505075 A JP 8505075A JP S528782 A JPS528782 A JP S528782A
Authority
JP
Japan
Prior art keywords
charge coupled
coupled device
device process
charge
effiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8505075A
Other languages
Japanese (ja)
Inventor
Tsuyoshi Tanahashi
Kunikazu Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8505075A priority Critical patent/JPS528782A/en
Publication of JPS528782A publication Critical patent/JPS528782A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/762—Charge transfer devices
    • H01L29/765—Charge-coupled devices
    • H01L29/768—Charge-coupled devices with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:By diffusing using a photoresist film as a mask after forming gate electrodes, unify the charge transfer effiency of charge coupled devices improve degree of integration.
JP8505075A 1975-07-10 1975-07-10 Charge coupled device process Pending JPS528782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8505075A JPS528782A (en) 1975-07-10 1975-07-10 Charge coupled device process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8505075A JPS528782A (en) 1975-07-10 1975-07-10 Charge coupled device process

Publications (1)

Publication Number Publication Date
JPS528782A true JPS528782A (en) 1977-01-22

Family

ID=13847830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8505075A Pending JPS528782A (en) 1975-07-10 1975-07-10 Charge coupled device process

Country Status (1)

Country Link
JP (1) JPS528782A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286987A (en) * 1991-11-26 1994-02-15 Sharp Kabushiki Kaisha Charge transfer device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286987A (en) * 1991-11-26 1994-02-15 Sharp Kabushiki Kaisha Charge transfer device
US5385860A (en) * 1991-11-26 1995-01-31 Sharp Kabushiki Kaisha Charge transfer device

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