JPS5285082A - Film thickness controlling in thin film formation - Google Patents

Film thickness controlling in thin film formation

Info

Publication number
JPS5285082A
JPS5285082A JP114076A JP114076A JPS5285082A JP S5285082 A JPS5285082 A JP S5285082A JP 114076 A JP114076 A JP 114076A JP 114076 A JP114076 A JP 114076A JP S5285082 A JPS5285082 A JP S5285082A
Authority
JP
Japan
Prior art keywords
thin film
thickness controlling
film thickness
film formation
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP114076A
Other languages
Japanese (ja)
Other versions
JPS5745305B2 (en
Inventor
Akihiko Toku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP114076A priority Critical patent/JPS5285082A/en
Publication of JPS5285082A publication Critical patent/JPS5285082A/en
Publication of JPS5745305B2 publication Critical patent/JPS5745305B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To control film thickness in transferring an article to be treated above an evaporation source and forming a thin film on it, by detecting thickness of the thin film with a light projector-receiver.
JP114076A 1976-01-08 1976-01-08 Film thickness controlling in thin film formation Granted JPS5285082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP114076A JPS5285082A (en) 1976-01-08 1976-01-08 Film thickness controlling in thin film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP114076A JPS5285082A (en) 1976-01-08 1976-01-08 Film thickness controlling in thin film formation

Publications (2)

Publication Number Publication Date
JPS5285082A true JPS5285082A (en) 1977-07-15
JPS5745305B2 JPS5745305B2 (en) 1982-09-27

Family

ID=11493131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP114076A Granted JPS5285082A (en) 1976-01-08 1976-01-08 Film thickness controlling in thin film formation

Country Status (1)

Country Link
JP (1) JPS5285082A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254404U (en) * 1988-10-13 1990-04-19

Also Published As

Publication number Publication date
JPS5745305B2 (en) 1982-09-27

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