JPS5283184A - Production of integrated circuit operated at extra low temperatures - Google Patents

Production of integrated circuit operated at extra low temperatures

Info

Publication number
JPS5283184A
JPS5283184A JP15850275A JP15850275A JPS5283184A JP S5283184 A JPS5283184 A JP S5283184A JP 15850275 A JP15850275 A JP 15850275A JP 15850275 A JP15850275 A JP 15850275A JP S5283184 A JPS5283184 A JP S5283184A
Authority
JP
Japan
Prior art keywords
production
extra low
integrated circuit
low temperatures
circuit operated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15850275A
Other languages
Japanese (ja)
Other versions
JPS5633871B2 (en
Inventor
Nobuo Sasaki
Takashi Iwai
Yoshiiku Togei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15850275A priority Critical patent/JPS5283184A/en
Publication of JPS5283184A publication Critical patent/JPS5283184A/en
Publication of JPS5633871B2 publication Critical patent/JPS5633871B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To stabilize the operation of an IC including Josephson elements by performing compensation diffusion of an impurity of an oppsite conductivity type in a resistive element forming region so that resistivity does not vary against temperature changes in an extra low temperature region.
COPYRIGHT: (C)1977,JPO&Japio
JP15850275A 1975-12-31 1975-12-31 Production of integrated circuit operated at extra low temperatures Granted JPS5283184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15850275A JPS5283184A (en) 1975-12-31 1975-12-31 Production of integrated circuit operated at extra low temperatures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15850275A JPS5283184A (en) 1975-12-31 1975-12-31 Production of integrated circuit operated at extra low temperatures

Publications (2)

Publication Number Publication Date
JPS5283184A true JPS5283184A (en) 1977-07-11
JPS5633871B2 JPS5633871B2 (en) 1981-08-06

Family

ID=15673128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15850275A Granted JPS5283184A (en) 1975-12-31 1975-12-31 Production of integrated circuit operated at extra low temperatures

Country Status (1)

Country Link
JP (1) JPS5283184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6823752B2 (en) 2000-12-28 2004-11-30 Lintec Corporation Polyhedron inspection feeder and polyhedron inspection apparatus
US8154593B2 (en) 2007-06-19 2012-04-10 Qualicaps Co., Ltd. Appearance inspection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6823752B2 (en) 2000-12-28 2004-11-30 Lintec Corporation Polyhedron inspection feeder and polyhedron inspection apparatus
US6892593B2 (en) 2000-12-28 2005-05-17 Lintec Corporation Polyhedron inspection feeder and polyhedron inspection apparatus
US8154593B2 (en) 2007-06-19 2012-04-10 Qualicaps Co., Ltd. Appearance inspection device

Also Published As

Publication number Publication date
JPS5633871B2 (en) 1981-08-06

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