JPS5283184A - Production of integrated circuit operated at extra low temperatures - Google Patents
Production of integrated circuit operated at extra low temperaturesInfo
- Publication number
- JPS5283184A JPS5283184A JP15850275A JP15850275A JPS5283184A JP S5283184 A JPS5283184 A JP S5283184A JP 15850275 A JP15850275 A JP 15850275A JP 15850275 A JP15850275 A JP 15850275A JP S5283184 A JPS5283184 A JP S5283184A
- Authority
- JP
- Japan
- Prior art keywords
- production
- extra low
- integrated circuit
- low temperatures
- circuit operated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To stabilize the operation of an IC including Josephson elements by performing compensation diffusion of an impurity of an oppsite conductivity type in a resistive element forming region so that resistivity does not vary against temperature changes in an extra low temperature region.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15850275A JPS5283184A (en) | 1975-12-31 | 1975-12-31 | Production of integrated circuit operated at extra low temperatures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15850275A JPS5283184A (en) | 1975-12-31 | 1975-12-31 | Production of integrated circuit operated at extra low temperatures |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5283184A true JPS5283184A (en) | 1977-07-11 |
JPS5633871B2 JPS5633871B2 (en) | 1981-08-06 |
Family
ID=15673128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15850275A Granted JPS5283184A (en) | 1975-12-31 | 1975-12-31 | Production of integrated circuit operated at extra low temperatures |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5283184A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6823752B2 (en) | 2000-12-28 | 2004-11-30 | Lintec Corporation | Polyhedron inspection feeder and polyhedron inspection apparatus |
US8154593B2 (en) | 2007-06-19 | 2012-04-10 | Qualicaps Co., Ltd. | Appearance inspection device |
-
1975
- 1975-12-31 JP JP15850275A patent/JPS5283184A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6823752B2 (en) | 2000-12-28 | 2004-11-30 | Lintec Corporation | Polyhedron inspection feeder and polyhedron inspection apparatus |
US6892593B2 (en) | 2000-12-28 | 2005-05-17 | Lintec Corporation | Polyhedron inspection feeder and polyhedron inspection apparatus |
US8154593B2 (en) | 2007-06-19 | 2012-04-10 | Qualicaps Co., Ltd. | Appearance inspection device |
Also Published As
Publication number | Publication date |
---|---|
JPS5633871B2 (en) | 1981-08-06 |
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