JPS5282185A - Vapor phase etching device - Google Patents

Vapor phase etching device

Info

Publication number
JPS5282185A
JPS5282185A JP15781675A JP15781675A JPS5282185A JP S5282185 A JPS5282185 A JP S5282185A JP 15781675 A JP15781675 A JP 15781675A JP 15781675 A JP15781675 A JP 15781675A JP S5282185 A JPS5282185 A JP S5282185A
Authority
JP
Japan
Prior art keywords
vapor phase
etching device
phase etching
tubular bodies
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15781675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5636569B2 (Direct
Inventor
Haruhiko Abe
Akira Nishimoto
Kuniaki Miyake
Yumiko Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15781675A priority Critical patent/JPS5282185A/ja
Publication of JPS5282185A publication Critical patent/JPS5282185A/ja
Publication of JPS5636569B2 publication Critical patent/JPS5636569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15781675A 1975-12-29 1975-12-29 Vapor phase etching device Granted JPS5282185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15781675A JPS5282185A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15781675A JPS5282185A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Publications (2)

Publication Number Publication Date
JPS5282185A true JPS5282185A (en) 1977-07-09
JPS5636569B2 JPS5636569B2 (Direct) 1981-08-25

Family

ID=15657914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15781675A Granted JPS5282185A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Country Status (1)

Country Link
JP (1) JPS5282185A (Direct)

Also Published As

Publication number Publication date
JPS5636569B2 (Direct) 1981-08-25

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