Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Fujitsu Ltd
Original Assignee
Fujitsu Ltd
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Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP15898275ApriorityCriticalpatent/JPS5282182A/en
Publication of JPS5282182ApublicationCriticalpatent/JPS5282182A/en
Testing Or Measuring Of Semiconductors Or The Like
(AREA)
Abstract
PURPOSE: To accurately evalute semiconductor materials by making possible highly accurate measurement of deep impurity levels within the semiconductor materials easily within a short time.
COPYRIGHT: (C)1977,JPO&Japio
JP15898275A1975-12-291975-12-29Method and apparatus for evaluation of semiconductor materials
PendingJPS5282182A
(en)