JPS5281692A - Method of grinding general metallic materials and composites for grinding - Google Patents

Method of grinding general metallic materials and composites for grinding

Info

Publication number
JPS5281692A
JPS5281692A JP15869875A JP15869875A JPS5281692A JP S5281692 A JPS5281692 A JP S5281692A JP 15869875 A JP15869875 A JP 15869875A JP 15869875 A JP15869875 A JP 15869875A JP S5281692 A JPS5281692 A JP S5281692A
Authority
JP
Japan
Prior art keywords
grinding
composites
metallic materials
general metallic
general
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15869875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5344273B2 (OSRAM
Inventor
Isamu Koshiyama
Tetsuji Senda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Kenmazai Kogyo Co Ltd
Original Assignee
Fujimi Kenmazai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Kenmazai Kogyo Co Ltd filed Critical Fujimi Kenmazai Kogyo Co Ltd
Priority to JP15869875A priority Critical patent/JPS5281692A/ja
Publication of JPS5281692A publication Critical patent/JPS5281692A/ja
Publication of JPS5344273B2 publication Critical patent/JPS5344273B2/ja
Granted legal-status Critical Current

Links

JP15869875A 1975-12-28 1975-12-28 Method of grinding general metallic materials and composites for grinding Granted JPS5281692A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15869875A JPS5281692A (en) 1975-12-28 1975-12-28 Method of grinding general metallic materials and composites for grinding

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15869875A JPS5281692A (en) 1975-12-28 1975-12-28 Method of grinding general metallic materials and composites for grinding

Publications (2)

Publication Number Publication Date
JPS5281692A true JPS5281692A (en) 1977-07-08
JPS5344273B2 JPS5344273B2 (OSRAM) 1978-11-28

Family

ID=15677393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15869875A Granted JPS5281692A (en) 1975-12-28 1975-12-28 Method of grinding general metallic materials and composites for grinding

Country Status (1)

Country Link
JP (1) JPS5281692A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004646A1 (en) * 1996-07-25 1998-02-05 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6638326B2 (en) 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013077281A1 (ja) * 2011-11-25 2013-05-30 株式会社 フジミインコーポレーテッド 合金材料の研磨方法及び合金材料の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
JPS49100689A (OSRAM) * 1973-01-27 1974-09-24
JPS50144987A (OSRAM) * 1974-05-13 1975-11-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
JPS49100689A (OSRAM) * 1973-01-27 1974-09-24
JPS50144987A (OSRAM) * 1974-05-13 1975-11-21

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004646A1 (en) * 1996-07-25 1998-02-05 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6117783A (en) * 1996-07-25 2000-09-12 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6313039B1 (en) 1996-07-25 2001-11-06 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6635186B1 (en) 1996-07-25 2003-10-21 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6638326B2 (en) 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride
US7033409B2 (en) 2001-09-25 2006-04-25 Dananomaterials Llc Compositions for chemical mechanical planarization of tantalum and tantalum nitride

Also Published As

Publication number Publication date
JPS5344273B2 (OSRAM) 1978-11-28

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