JPS5344273B2 - - Google Patents
Info
- Publication number
- JPS5344273B2 JPS5344273B2 JP15869875A JP15869875A JPS5344273B2 JP S5344273 B2 JPS5344273 B2 JP S5344273B2 JP 15869875 A JP15869875 A JP 15869875A JP 15869875 A JP15869875 A JP 15869875A JP S5344273 B2 JPS5344273 B2 JP S5344273B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15869875A JPS5281692A (en) | 1975-12-28 | 1975-12-28 | Method of grinding general metallic materials and composites for grinding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15869875A JPS5281692A (en) | 1975-12-28 | 1975-12-28 | Method of grinding general metallic materials and composites for grinding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5281692A JPS5281692A (en) | 1977-07-08 |
| JPS5344273B2 true JPS5344273B2 (OSRAM) | 1978-11-28 |
Family
ID=15677393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15869875A Granted JPS5281692A (en) | 1975-12-28 | 1975-12-28 | Method of grinding general metallic materials and composites for grinding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5281692A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2013077281A1 (ja) * | 2011-11-25 | 2015-04-27 | 株式会社フジミインコーポレーテッド | 合金材料の研磨方法及び合金材料の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6117783A (en) * | 1996-07-25 | 2000-09-12 | Ekc Technology, Inc. | Chemical mechanical polishing composition and process |
| US6638326B2 (en) | 2001-09-25 | 2003-10-28 | Ekc Technology, Inc. | Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3429080A (en) * | 1966-05-02 | 1969-02-25 | Tizon Chem Corp | Composition for polishing crystalline silicon and germanium and process |
| JPS533518B2 (OSRAM) * | 1973-01-27 | 1978-02-07 | ||
| JPS536756B2 (OSRAM) * | 1974-05-13 | 1978-03-10 |
-
1975
- 1975-12-28 JP JP15869875A patent/JPS5281692A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2013077281A1 (ja) * | 2011-11-25 | 2015-04-27 | 株式会社フジミインコーポレーテッド | 合金材料の研磨方法及び合金材料の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5281692A (en) | 1977-07-08 |