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JPS5281692A - Method of grinding general metallic materials and composites for grinding - Google Patents

Method of grinding general metallic materials and composites for grinding

Info

Publication number
JPS5281692A
JPS5281692A JP15869875A JP15869875A JPS5281692A JP S5281692 A JPS5281692 A JP S5281692A JP 15869875 A JP15869875 A JP 15869875A JP 15869875 A JP15869875 A JP 15869875A JP S5281692 A JPS5281692 A JP S5281692A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
grinding
method
general
metallic
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15869875A
Other versions
JPS5344273B2 (en )
Inventor
Isamu Koshiyama
Tetsuji Senda
Original Assignee
Fujimi Kenmazai Kougiyou Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

JP15869875A 1975-12-28 1975-12-28 Expired JPS5344273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15869875A JPS5344273B2 (en) 1975-12-28 1975-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15869875A JPS5344273B2 (en) 1975-12-28 1975-12-28

Publications (2)

Publication Number Publication Date
JPS5281692A true true JPS5281692A (en) 1977-07-08
JPS5344273B2 JPS5344273B2 (en) 1978-11-28

Family

ID=15677393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15869875A Expired JPS5344273B2 (en) 1975-12-28 1975-12-28

Country Status (1)

Country Link
JP (1) JPS5344273B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004646A1 (en) * 1996-07-25 1998-02-05 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6638326B2 (en) 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103945983A (en) * 2011-11-25 2014-07-23 福吉米株式会社 Method for polishing alloy material and method for producing alloy material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
JPS49100689A (en) * 1973-01-27 1974-09-24
JPS50144987A (en) * 1974-05-13 1975-11-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
JPS49100689A (en) * 1973-01-27 1974-09-24
JPS50144987A (en) * 1974-05-13 1975-11-21

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004646A1 (en) * 1996-07-25 1998-02-05 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6117783A (en) * 1996-07-25 2000-09-12 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6313039B1 (en) 1996-07-25 2001-11-06 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6635186B1 (en) 1996-07-25 2003-10-21 Ekc Technology, Inc. Chemical mechanical polishing composition and process
US6638326B2 (en) 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride
US7033409B2 (en) 2001-09-25 2006-04-25 Dananomaterials Llc Compositions for chemical mechanical planarization of tantalum and tantalum nitride

Also Published As

Publication number Publication date Type
JPS5344273B2 (en) 1978-11-28 grant
JP1033266C (en) grant

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