JPS5279396A - Surface polishing device of thin film sheet - Google Patents
Surface polishing device of thin film sheetInfo
- Publication number
- JPS5279396A JPS5279396A JP15561875A JP15561875A JPS5279396A JP S5279396 A JPS5279396 A JP S5279396A JP 15561875 A JP15561875 A JP 15561875A JP 15561875 A JP15561875 A JP 15561875A JP S5279396 A JPS5279396 A JP S5279396A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film sheet
- polishing device
- surface polishing
- grained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15561875A JPS5279396A (en) | 1975-12-25 | 1975-12-25 | Surface polishing device of thin film sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15561875A JPS5279396A (en) | 1975-12-25 | 1975-12-25 | Surface polishing device of thin film sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5279396A true JPS5279396A (en) | 1977-07-04 |
| JPS5631227B2 JPS5631227B2 (enExample) | 1981-07-20 |
Family
ID=15609936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15561875A Granted JPS5279396A (en) | 1975-12-25 | 1975-12-25 | Surface polishing device of thin film sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5279396A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01203831A (ja) * | 1988-02-09 | 1989-08-16 | Shimizu Corp | 排熱回収システム |
-
1975
- 1975-12-25 JP JP15561875A patent/JPS5279396A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5631227B2 (enExample) | 1981-07-20 |
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