JPS5279395A - Surface polishing device of thin film sheet - Google Patents

Surface polishing device of thin film sheet

Info

Publication number
JPS5279395A
JPS5279395A JP15561775A JP15561775A JPS5279395A JP S5279395 A JPS5279395 A JP S5279395A JP 15561775 A JP15561775 A JP 15561775A JP 15561775 A JP15561775 A JP 15561775A JP S5279395 A JPS5279395 A JP S5279395A
Authority
JP
Japan
Prior art keywords
thin film
polishing device
film sheet
surface polishing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15561775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5631226B2 (enExample
Inventor
Kiyoshi Akamatsu
Yutaka Kino
Shigetoshi Hashiguchi
Akihiko Kurata
Takashi Nuwa
Masanori Nagataki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Mitsubishi Heavy Industries Ltd
Asahi Chemical Industry Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP15561775A priority Critical patent/JPS5279395A/ja
Publication of JPS5279395A publication Critical patent/JPS5279395A/ja
Publication of JPS5631226B2 publication Critical patent/JPS5631226B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
JP15561775A 1975-12-25 1975-12-25 Surface polishing device of thin film sheet Granted JPS5279395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15561775A JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15561775A JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Publications (2)

Publication Number Publication Date
JPS5279395A true JPS5279395A (en) 1977-07-04
JPS5631226B2 JPS5631226B2 (enExample) 1981-07-20

Family

ID=15609915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15561775A Granted JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Country Status (1)

Country Link
JP (1) JPS5279395A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125768A (ja) * 1984-11-20 1986-06-13 Sumitomo Metal Ind Ltd 脆性材料の切断方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125768A (ja) * 1984-11-20 1986-06-13 Sumitomo Metal Ind Ltd 脆性材料の切断方法

Also Published As

Publication number Publication date
JPS5631226B2 (enExample) 1981-07-20

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