JPS5273788A - Silid analyzer capable of performing somultaneous counting - Google Patents
Silid analyzer capable of performing somultaneous countingInfo
- Publication number
- JPS5273788A JPS5273788A JP50149620A JP14962075A JPS5273788A JP S5273788 A JPS5273788 A JP S5273788A JP 50149620 A JP50149620 A JP 50149620A JP 14962075 A JP14962075 A JP 14962075A JP S5273788 A JPS5273788 A JP S5273788A
- Authority
- JP
- Japan
- Prior art keywords
- somultaneous
- silid
- counting
- information
- analyzer capable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50149620A JPS5273788A (en) | 1975-12-17 | 1975-12-17 | Silid analyzer capable of performing somultaneous counting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50149620A JPS5273788A (en) | 1975-12-17 | 1975-12-17 | Silid analyzer capable of performing somultaneous counting |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5273788A true JPS5273788A (en) | 1977-06-21 |
Family
ID=15479186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50149620A Pending JPS5273788A (en) | 1975-12-17 | 1975-12-17 | Silid analyzer capable of performing somultaneous counting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5273788A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126752A (en) * | 1980-03-11 | 1981-10-05 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting device for defect of mask |
JPH02181640A (ja) * | 1989-01-06 | 1990-07-16 | Nec Corp | 高面分解能カソードルミネッセンス装置 |
WO1998023946A1 (de) * | 1996-11-27 | 1998-06-04 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Elektronenstrahlanalyse |
-
1975
- 1975-12-17 JP JP50149620A patent/JPS5273788A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126752A (en) * | 1980-03-11 | 1981-10-05 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting device for defect of mask |
JPH0130082B2 (ja) * | 1980-03-11 | 1989-06-16 | Nippon Telegraph & Telephone | |
JPH02181640A (ja) * | 1989-01-06 | 1990-07-16 | Nec Corp | 高面分解能カソードルミネッセンス装置 |
WO1998023946A1 (de) * | 1996-11-27 | 1998-06-04 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Elektronenstrahlanalyse |
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