JPS5273683A - Semiconductor thin film pressure transducer - Google Patents

Semiconductor thin film pressure transducer

Info

Publication number
JPS5273683A
JPS5273683A JP50150299A JP15029975A JPS5273683A JP S5273683 A JPS5273683 A JP S5273683A JP 50150299 A JP50150299 A JP 50150299A JP 15029975 A JP15029975 A JP 15029975A JP S5273683 A JPS5273683 A JP S5273683A
Authority
JP
Japan
Prior art keywords
thin film
pressure transducer
semiconductor thin
film pressure
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50150299A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5521467B2 (2
Inventor
Nobuyoshi Taguchi
Koji Matsuo
Fujio Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50150299A priority Critical patent/JPS5273683A/ja
Publication of JPS5273683A publication Critical patent/JPS5273683A/ja
Publication of JPS5521467B2 publication Critical patent/JPS5521467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP50150299A 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer Granted JPS5273683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50150299A JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50150299A JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Publications (2)

Publication Number Publication Date
JPS5273683A true JPS5273683A (en) 1977-06-20
JPS5521467B2 JPS5521467B2 (2) 1980-06-10

Family

ID=15493958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50150299A Granted JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Country Status (1)

Country Link
JP (1) JPS5273683A (2)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (2) * 1971-12-28 1973-09-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (2) * 1971-12-28 1973-09-28

Also Published As

Publication number Publication date
JPS5521467B2 (2) 1980-06-10

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