JPS5272523A - Device for deflecting charged particle beam - Google Patents

Device for deflecting charged particle beam

Info

Publication number
JPS5272523A
JPS5272523A JP50149232A JP14923275A JPS5272523A JP S5272523 A JPS5272523 A JP S5272523A JP 50149232 A JP50149232 A JP 50149232A JP 14923275 A JP14923275 A JP 14923275A JP S5272523 A JPS5272523 A JP S5272523A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
deflecting charged
deflecting
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50149232A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5744222B2 (cg-RX-API-DMAC7.html
Inventor
Hajime Ooiwa
Hidekazu Gotou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP50149232A priority Critical patent/JPS5272523A/ja
Publication of JPS5272523A publication Critical patent/JPS5272523A/ja
Publication of JPS5744222B2 publication Critical patent/JPS5744222B2/ja
Granted legal-status Critical Current

Links

JP50149232A 1975-12-15 1975-12-15 Device for deflecting charged particle beam Granted JPS5272523A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50149232A JPS5272523A (en) 1975-12-15 1975-12-15 Device for deflecting charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50149232A JPS5272523A (en) 1975-12-15 1975-12-15 Device for deflecting charged particle beam

Publications (2)

Publication Number Publication Date
JPS5272523A true JPS5272523A (en) 1977-06-17
JPS5744222B2 JPS5744222B2 (cg-RX-API-DMAC7.html) 1982-09-20

Family

ID=15470751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50149232A Granted JPS5272523A (en) 1975-12-15 1975-12-15 Device for deflecting charged particle beam

Country Status (1)

Country Link
JP (1) JPS5272523A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968153A (ja) * 1982-10-09 1984-04-18 Sony Corp インライン形カラ−陰極線管の偏向コイル装置
JPS5990347A (ja) * 1982-11-15 1984-05-24 Jeol Ltd 鞍型偏向コイル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968153A (ja) * 1982-10-09 1984-04-18 Sony Corp インライン形カラ−陰極線管の偏向コイル装置
JPS5990347A (ja) * 1982-11-15 1984-05-24 Jeol Ltd 鞍型偏向コイル

Also Published As

Publication number Publication date
JPS5744222B2 (cg-RX-API-DMAC7.html) 1982-09-20

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