JPS5269270A - Coating method of photoresist - Google Patents

Coating method of photoresist

Info

Publication number
JPS5269270A
JPS5269270A JP14574475A JP14574475A JPS5269270A JP S5269270 A JPS5269270 A JP S5269270A JP 14574475 A JP14574475 A JP 14574475A JP 14574475 A JP14574475 A JP 14574475A JP S5269270 A JPS5269270 A JP S5269270A
Authority
JP
Japan
Prior art keywords
photoresist
coating method
photoregist
coating
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14574475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5522018B2 (enrdf_load_stackoverflow
Inventor
Hideo Kawasaki
Susumu Sugumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP14574475A priority Critical patent/JPS5269270A/ja
Publication of JPS5269270A publication Critical patent/JPS5269270A/ja
Publication of JPS5522018B2 publication Critical patent/JPS5522018B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14574475A 1975-12-05 1975-12-05 Coating method of photoresist Granted JPS5269270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14574475A JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14574475A JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Publications (2)

Publication Number Publication Date
JPS5269270A true JPS5269270A (en) 1977-06-08
JPS5522018B2 JPS5522018B2 (enrdf_load_stackoverflow) 1980-06-13

Family

ID=15392134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14574475A Granted JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Country Status (1)

Country Link
JP (1) JPS5269270A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460568A (en) * 1977-10-24 1979-05-16 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS55500646A (enrdf_load_stackoverflow) * 1978-09-11 1980-09-11
JPS5618420A (en) * 1979-07-23 1981-02-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6132469A (ja) * 1984-07-24 1986-02-15 Toppan Printing Co Ltd カラー固体撮像素子の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460568A (en) * 1977-10-24 1979-05-16 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS55500646A (enrdf_load_stackoverflow) * 1978-09-11 1980-09-11
JPS5618420A (en) * 1979-07-23 1981-02-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6132469A (ja) * 1984-07-24 1986-02-15 Toppan Printing Co Ltd カラー固体撮像素子の製造方法

Also Published As

Publication number Publication date
JPS5522018B2 (enrdf_load_stackoverflow) 1980-06-13

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