JPS5266487A - Wien filter form mass separator considering two axis deflection - Google Patents

Wien filter form mass separator considering two axis deflection

Info

Publication number
JPS5266487A
JPS5266487A JP50141626A JP14162675A JPS5266487A JP S5266487 A JPS5266487 A JP S5266487A JP 50141626 A JP50141626 A JP 50141626A JP 14162675 A JP14162675 A JP 14162675A JP S5266487 A JPS5266487 A JP S5266487A
Authority
JP
Japan
Prior art keywords
considering
axis deflection
wien filter
mass separator
filter form
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50141626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5727577B2 (cg-RX-API-DMAC7.html
Inventor
Hiroshi Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50141626A priority Critical patent/JPS5266487A/ja
Publication of JPS5266487A publication Critical patent/JPS5266487A/ja
Publication of JPS5727577B2 publication Critical patent/JPS5727577B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP50141626A 1975-11-28 1975-11-28 Wien filter form mass separator considering two axis deflection Granted JPS5266487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50141626A JPS5266487A (en) 1975-11-28 1975-11-28 Wien filter form mass separator considering two axis deflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50141626A JPS5266487A (en) 1975-11-28 1975-11-28 Wien filter form mass separator considering two axis deflection

Publications (2)

Publication Number Publication Date
JPS5266487A true JPS5266487A (en) 1977-06-01
JPS5727577B2 JPS5727577B2 (cg-RX-API-DMAC7.html) 1982-06-11

Family

ID=15296403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50141626A Granted JPS5266487A (en) 1975-11-28 1975-11-28 Wien filter form mass separator considering two axis deflection

Country Status (1)

Country Link
JP (1) JPS5266487A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979950A (ja) * 1982-10-29 1984-05-09 Murata Mfg Co Ltd 質量分析計用分析管
CN102737938A (zh) * 2011-04-15 2012-10-17 Fei公司 宽孔径维恩ExB质量过滤器
WO2022091475A1 (ja) * 2020-10-28 2022-05-05 株式会社ニューフレアテクノロジー ウィーンフィルタ及びマルチ電子ビーム検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919790A (ja) * 1982-07-26 1984-02-01 Matsushita Electric Ind Co Ltd ガス器具の器具せん操作装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979950A (ja) * 1982-10-29 1984-05-09 Murata Mfg Co Ltd 質量分析計用分析管
CN102737938A (zh) * 2011-04-15 2012-10-17 Fei公司 宽孔径维恩ExB质量过滤器
JP2012227140A (ja) * 2011-04-15 2012-11-15 Fei Co 大開口のウィーンｅ×ｂ質量フィルタ本発明は、荷電粒子ビームシステムに関し、特に、イオンビームシステムのための質量フィルタに関する。
WO2022091475A1 (ja) * 2020-10-28 2022-05-05 株式会社ニューフレアテクノロジー ウィーンフィルタ及びマルチ電子ビーム検査装置
JPWO2022091475A1 (cg-RX-API-DMAC7.html) * 2020-10-28 2022-05-05

Also Published As

Publication number Publication date
JPS5727577B2 (cg-RX-API-DMAC7.html) 1982-06-11

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