JPS5261686A - Testing method of process - Google Patents

Testing method of process

Info

Publication number
JPS5261686A
JPS5261686A JP50137905A JP13790575A JPS5261686A JP S5261686 A JPS5261686 A JP S5261686A JP 50137905 A JP50137905 A JP 50137905A JP 13790575 A JP13790575 A JP 13790575A JP S5261686 A JPS5261686 A JP S5261686A
Authority
JP
Japan
Prior art keywords
testing method
time
evaluating
feeding
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50137905A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118207B2 (enrdf_load_stackoverflow
Inventor
Tokuji Oota
Hideji Hayashibe
Yoshihiro Imaizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP50137905A priority Critical patent/JPS5261686A/ja
Publication of JPS5261686A publication Critical patent/JPS5261686A/ja
Publication of JPS6118207B2 publication Critical patent/JPS6118207B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
JP50137905A 1975-11-17 1975-11-17 Testing method of process Granted JPS5261686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50137905A JPS5261686A (en) 1975-11-17 1975-11-17 Testing method of process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50137905A JPS5261686A (en) 1975-11-17 1975-11-17 Testing method of process

Publications (2)

Publication Number Publication Date
JPS5261686A true JPS5261686A (en) 1977-05-21
JPS6118207B2 JPS6118207B2 (enrdf_load_stackoverflow) 1986-05-12

Family

ID=15209409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50137905A Granted JPS5261686A (en) 1975-11-17 1975-11-17 Testing method of process

Country Status (1)

Country Link
JP (1) JPS5261686A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107080A (ja) * 1981-12-21 1983-06-25 Yaskawa Electric Mfg Co Ltd 電動機速度制御系のゲイン自動補正方式
US9383660B2 (en) 2011-05-20 2016-07-05 Canon Kabushiki Kaisha Exposure apparatus and method of manufacturing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107080A (ja) * 1981-12-21 1983-06-25 Yaskawa Electric Mfg Co Ltd 電動機速度制御系のゲイン自動補正方式
US9383660B2 (en) 2011-05-20 2016-07-05 Canon Kabushiki Kaisha Exposure apparatus and method of manufacturing device

Also Published As

Publication number Publication date
JPS6118207B2 (enrdf_load_stackoverflow) 1986-05-12

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