JPS5261686A - Testing method of process - Google Patents
Testing method of processInfo
- Publication number
- JPS5261686A JPS5261686A JP50137905A JP13790575A JPS5261686A JP S5261686 A JPS5261686 A JP S5261686A JP 50137905 A JP50137905 A JP 50137905A JP 13790575 A JP13790575 A JP 13790575A JP S5261686 A JPS5261686 A JP S5261686A
- Authority
- JP
- Japan
- Prior art keywords
- testing method
- time
- evaluating
- feeding
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing And Monitoring For Control Systems (AREA)
Abstract
PURPOSE:To complete the test of process characteristics in a short time, by feeding the process with stepped inputs until the alteration rate of the process output reaches the set point and by evaluating the dynamic characteristics of the process in reference to the process output quantity up to that time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50137905A JPS5261686A (en) | 1975-11-17 | 1975-11-17 | Testing method of process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50137905A JPS5261686A (en) | 1975-11-17 | 1975-11-17 | Testing method of process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5261686A true JPS5261686A (en) | 1977-05-21 |
JPS6118207B2 JPS6118207B2 (en) | 1986-05-12 |
Family
ID=15209409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50137905A Granted JPS5261686A (en) | 1975-11-17 | 1975-11-17 | Testing method of process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5261686A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107080A (en) * | 1981-12-21 | 1983-06-25 | Yaskawa Electric Mfg Co Ltd | Automatic correction system of gain of motor speed control system |
US9383660B2 (en) | 2011-05-20 | 2016-07-05 | Canon Kabushiki Kaisha | Exposure apparatus and method of manufacturing device |
-
1975
- 1975-11-17 JP JP50137905A patent/JPS5261686A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107080A (en) * | 1981-12-21 | 1983-06-25 | Yaskawa Electric Mfg Co Ltd | Automatic correction system of gain of motor speed control system |
JPH0118672B2 (en) * | 1981-12-21 | 1989-04-06 | Yaskawa Denki Seisakusho Kk | |
US9383660B2 (en) | 2011-05-20 | 2016-07-05 | Canon Kabushiki Kaisha | Exposure apparatus and method of manufacturing device |
Also Published As
Publication number | Publication date |
---|---|
JPS6118207B2 (en) | 1986-05-12 |
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