JPS5256557A - Moire measuring system for object shape - Google Patents
Moire measuring system for object shapeInfo
- Publication number
- JPS5256557A JPS5256557A JP13272675A JP13272675A JPS5256557A JP S5256557 A JPS5256557 A JP S5256557A JP 13272675 A JP13272675 A JP 13272675A JP 13272675 A JP13272675 A JP 13272675A JP S5256557 A JPS5256557 A JP S5256557A
- Authority
- JP
- Japan
- Prior art keywords
- moire
- measuring system
- object shape
- shape
- moire measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13272675A JPS5256557A (en) | 1975-11-04 | 1975-11-04 | Moire measuring system for object shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13272675A JPS5256557A (en) | 1975-11-04 | 1975-11-04 | Moire measuring system for object shape |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5256557A true JPS5256557A (en) | 1977-05-10 |
| JPS5632562B2 JPS5632562B2 (enExample) | 1981-07-29 |
Family
ID=15088139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13272675A Granted JPS5256557A (en) | 1975-11-04 | 1975-11-04 | Moire measuring system for object shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5256557A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61160763U (enExample) * | 1985-03-29 | 1986-10-04 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134463A (enExample) * | 1974-04-10 | 1975-10-24 |
-
1975
- 1975-11-04 JP JP13272675A patent/JPS5256557A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134463A (enExample) * | 1974-04-10 | 1975-10-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5632562B2 (enExample) | 1981-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5256557A (en) | Moire measuring system for object shape | |
| JPS5256558A (en) | Three-dimentional object measuring system | |
| JPS5410765A (en) | Measurement of any sharf | |
| JPS5440550A (en) | Analog-to-digital converter | |
| JPS5422858A (en) | Measurement of three-dimentional pattern by moire method | |
| JPS5294737A (en) | Contour extraction unit for object pattern | |
| JPS5312638A (en) | Measuring method for shape of circulr-section material | |
| JPS53120380A (en) | Measuring method of exposure accuracy of electron ray exposure apparatus | |
| JPS53108772A (en) | Production of semiconductor device | |
| JPS5285841A (en) | Pattern position determining apparatus | |
| JPS53104173A (en) | Master reticle for photo mask production | |
| JPS53123671A (en) | Characteristic measuring system of semiconuctor luminous element | |
| JPS5354479A (en) | Comparative inspecting apparatus of pattern plate | |
| JPS5361286A (en) | Production of semiconductor device | |
| JPS52119079A (en) | Electron beam exposure | |
| JPS5287057A (en) | Object shape measuring system | |
| JPS5386185A (en) | Pressure-electricity transducer | |
| JPS5255670A (en) | Multiple point simultaneous measuring system | |
| JPS5427462A (en) | Plate end detector | |
| JPS5289954A (en) | Approximate shape identifying apparatus for objects | |
| JPS5389460A (en) | Measuring method of relative position deviation | |
| JPS52139980A (en) | Connecting device | |
| JPS52134759A (en) | Moire measuring method of material shape | |
| JPS5329499A (en) | Measuring method of pre-critical degree | |
| JPS538025A (en) | Pattern indicator |