JPS525263A - Ion implanting apparatus - Google Patents

Ion implanting apparatus

Info

Publication number
JPS525263A
JPS525263A JP51059726A JP5972676A JPS525263A JP S525263 A JPS525263 A JP S525263A JP 51059726 A JP51059726 A JP 51059726A JP 5972676 A JP5972676 A JP 5972676A JP S525263 A JPS525263 A JP S525263A
Authority
JP
Japan
Prior art keywords
ion implanting
implanting apparatus
ion
implanting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51059726A
Other languages
English (en)
Other versions
JPS541627B2 (ja
Inventor
Shii Koo Uen
Chien Arubaato
Aaru Uinaado Jieemusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS525263A publication Critical patent/JPS525263A/ja
Publication of JPS541627B2 publication Critical patent/JPS541627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP51059726A 1975-06-30 1976-05-25 Ion implanting apparatus Granted JPS525263A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/592,149 US3999097A (en) 1975-06-30 1975-06-30 Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system

Publications (2)

Publication Number Publication Date
JPS525263A true JPS525263A (en) 1977-01-14
JPS541627B2 JPS541627B2 (ja) 1979-01-26

Family

ID=24369503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51059726A Granted JPS525263A (en) 1975-06-30 1976-05-25 Ion implanting apparatus

Country Status (6)

Country Link
US (1) US3999097A (ja)
JP (1) JPS525263A (ja)
DE (1) DE2627987A1 (ja)
FR (1) FR2316724A1 (ja)
GB (1) GB1492016A (ja)
IT (1) IT1064307B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254351A (ja) * 1986-04-28 1987-11-06 Nissin Electric Co Ltd イオン処理装置
JPS63146337A (ja) * 1986-12-08 1988-06-18 Fuji Electric Co Ltd イオンビ−ム装置
JPH01112650A (ja) * 1987-10-27 1989-05-01 Nissin Electric Co Ltd イオン注入装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151420A (en) * 1977-12-08 1979-04-24 International Business Machines Corporation Apparatus for the formation of epitaxial layers doped with conductivity-determining impurities by ion deposition
DE3018623C2 (de) * 1980-05-16 1983-03-24 Kernforschungsanlage Jülich GmbH, 5170 Jülich Beschleunigungsgitter
US4371774A (en) * 1980-11-26 1983-02-01 The United States Of America As Represented By The United States Department Of Energy High power linear pulsed beam annealer
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
US4447773A (en) * 1981-06-22 1984-05-08 California Institute Of Technology Ion beam accelerator system
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
DE3484334D1 (de) * 1983-08-15 1991-05-02 Applied Materials Inc Vorrichtung und verfahren zur ionenimplantation.
DE3838947A1 (de) * 1987-11-20 1989-06-01 Osaka Prefecture Ionenquelle
GB2224752B (en) * 1988-11-10 1992-08-05 Stc Plc Film deposition
US5023458A (en) * 1989-01-04 1991-06-11 Eaton Corporation Ion beam control system
US7528391B2 (en) * 2006-12-22 2009-05-05 Varian Semiconductor Equipment Associates, Inc. Techniques for reducing contamination during ion implantation
US9587292B2 (en) * 2009-10-01 2017-03-07 Advanced Applied Physics Solutions, Inc. Method and apparatus for isolating the radioisotope molybdenum-99
CN104091746A (zh) * 2014-06-30 2014-10-08 京东方科技集团股份有限公司 一种离子注入设备用电极和离子注入设备
WO2019005288A1 (en) * 2017-06-27 2019-01-03 Vandermeulen Peter F METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT
CN111199858B (zh) * 2018-11-20 2023-09-05 中国电子科技集团公司第四十八研究所 一种成形宽带离子束注入机

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117022A (en) * 1960-09-06 1964-01-07 Space Technhology Lab Inc Deposition arrangement
US3394217A (en) * 1965-06-11 1968-07-23 Air Reduction Method and apparatus for controlling plural electron beams
US3406305A (en) * 1965-07-05 1968-10-15 Lokomotivbau Elektrotechnisch High power electron gun with electron bombarded apertured cathode having a concave emission surface
US3434894A (en) * 1965-10-06 1969-03-25 Ion Physics Corp Fabricating solid state devices by ion implantation
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3585397A (en) * 1968-10-04 1971-06-15 Hughes Aircraft Co Programmed fine ion implantation beam system
US3558967A (en) * 1969-06-16 1971-01-26 Varian Associates Linear beam tube with plural cathode beamlets providing a convergent electron stream
US3748514A (en) * 1971-08-18 1973-07-24 A Standaart Multi-beam cathode ray tube character display
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
US3756862A (en) * 1971-12-21 1973-09-04 Ibm Proton enhanced diffusion methods
AT344287B (de) * 1972-03-30 1978-07-10 Kyoto Electronics Mfg Verfahren zur bestimmung der dichte einer flüssigkeit in einer schwingröhre

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254351A (ja) * 1986-04-28 1987-11-06 Nissin Electric Co Ltd イオン処理装置
JPH0744027B2 (ja) * 1986-04-28 1995-05-15 日新電機株式会社 イオン処理装置
JPS63146337A (ja) * 1986-12-08 1988-06-18 Fuji Electric Co Ltd イオンビ−ム装置
JPH01112650A (ja) * 1987-10-27 1989-05-01 Nissin Electric Co Ltd イオン注入装置

Also Published As

Publication number Publication date
US3999097A (en) 1976-12-21
DE2627987A1 (de) 1977-01-20
GB1492016A (en) 1977-11-16
FR2316724B1 (ja) 1978-11-17
JPS541627B2 (ja) 1979-01-26
IT1064307B (it) 1985-02-18
FR2316724A1 (fr) 1977-01-28

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