GB2224752B - Film deposition - Google Patents

Film deposition

Info

Publication number
GB2224752B
GB2224752B GB8826312A GB8826312A GB2224752B GB 2224752 B GB2224752 B GB 2224752B GB 8826312 A GB8826312 A GB 8826312A GB 8826312 A GB8826312 A GB 8826312A GB 2224752 B GB2224752 B GB 2224752B
Authority
GB
United Kingdom
Prior art keywords
film deposition
deposition
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8826312A
Other versions
GB2224752A (en
GB8826312D0 (en
Inventor
Roger James Williamson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Nortel Networks Optical Components Ltd
Original Assignee
STC PLC
Northern Telecom Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC, Northern Telecom Europe Ltd filed Critical STC PLC
Priority to GB8826312A priority Critical patent/GB2224752B/en
Publication of GB8826312D0 publication Critical patent/GB8826312D0/en
Publication of GB2224752A publication Critical patent/GB2224752A/en
Application granted granted Critical
Publication of GB2224752B publication Critical patent/GB2224752B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
GB8826312A 1988-11-10 1988-11-10 Film deposition Expired - Lifetime GB2224752B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8826312A GB2224752B (en) 1988-11-10 1988-11-10 Film deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8826312A GB2224752B (en) 1988-11-10 1988-11-10 Film deposition

Publications (3)

Publication Number Publication Date
GB8826312D0 GB8826312D0 (en) 1988-12-14
GB2224752A GB2224752A (en) 1990-05-16
GB2224752B true GB2224752B (en) 1992-08-05

Family

ID=10646641

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8826312A Expired - Lifetime GB2224752B (en) 1988-11-10 1988-11-10 Film deposition

Country Status (1)

Country Link
GB (1) GB2224752B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITPD20130328A1 (en) * 2013-11-28 2015-05-29 Spazzolificio Piave Spa PROCEDURE FOR THE BRUSH CUTTING HEADS

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201743A (en) * 1968-02-12 1970-08-12 Siemens Ag Improvements in or relating to the deposition of a layer of solid material on a substrate by cathode sputtering
GB1265834A (en) * 1969-10-13 1972-03-08
GB1402998A (en) * 1972-06-30 1975-08-13 Atomic Energy Research Inst Apparatus and process for forming p-n junction semiconductor units
GB1492016A (en) * 1975-06-30 1977-11-16 Ibm Ion implantation apparatus
GB1600218A (en) * 1977-06-06 1981-10-14 King W J Ion beam intplantation
US4523971A (en) * 1984-06-28 1985-06-18 International Business Machines Corporation Programmable ion beam patterning system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201743A (en) * 1968-02-12 1970-08-12 Siemens Ag Improvements in or relating to the deposition of a layer of solid material on a substrate by cathode sputtering
GB1265834A (en) * 1969-10-13 1972-03-08
GB1402998A (en) * 1972-06-30 1975-08-13 Atomic Energy Research Inst Apparatus and process for forming p-n junction semiconductor units
GB1492016A (en) * 1975-06-30 1977-11-16 Ibm Ion implantation apparatus
GB1600218A (en) * 1977-06-06 1981-10-14 King W J Ion beam intplantation
US4523971A (en) * 1984-06-28 1985-06-18 International Business Machines Corporation Programmable ion beam patterning system

Also Published As

Publication number Publication date
GB2224752A (en) 1990-05-16
GB8826312D0 (en) 1988-12-14

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20031110