JPS5250938A - Spattering device - Google Patents

Spattering device

Info

Publication number
JPS5250938A
JPS5250938A JP12779475A JP12779475A JPS5250938A JP S5250938 A JPS5250938 A JP S5250938A JP 12779475 A JP12779475 A JP 12779475A JP 12779475 A JP12779475 A JP 12779475A JP S5250938 A JPS5250938 A JP S5250938A
Authority
JP
Japan
Prior art keywords
spattering device
spattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12779475A
Other languages
Japanese (ja)
Other versions
JPS5532789B2 (en
Inventor
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP12779475A priority Critical patent/JPS5250938A/en
Publication of JPS5250938A publication Critical patent/JPS5250938A/en
Publication of JPS5532789B2 publication Critical patent/JPS5532789B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12779475A 1975-10-22 1975-10-22 Spattering device Granted JPS5250938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12779475A JPS5250938A (en) 1975-10-22 1975-10-22 Spattering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12779475A JPS5250938A (en) 1975-10-22 1975-10-22 Spattering device

Publications (2)

Publication Number Publication Date
JPS5250938A true JPS5250938A (en) 1977-04-23
JPS5532789B2 JPS5532789B2 (en) 1980-08-27

Family

ID=14968830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12779475A Granted JPS5250938A (en) 1975-10-22 1975-10-22 Spattering device

Country Status (1)

Country Link
JP (1) JPS5250938A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6071667U (en) * 1983-10-21 1985-05-21 オリンパス光学工業株式会社 Target for sputtering

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6822612B1 (en) 2019-02-19 2021-01-27 Ｊｆｅスチール株式会社 Rail manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6071667U (en) * 1983-10-21 1985-05-21 オリンパス光学工業株式会社 Target for sputtering

Also Published As

Publication number Publication date
JPS5532789B2 (en) 1980-08-27

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