JPS5266837A - Spattering device - Google Patents
Spattering deviceInfo
- Publication number
- JPS5266837A JPS5266837A JP12908075A JP12908075A JPS5266837A JP S5266837 A JPS5266837 A JP S5266837A JP 12908075 A JP12908075 A JP 12908075A JP 12908075 A JP12908075 A JP 12908075A JP S5266837 A JPS5266837 A JP S5266837A
- Authority
- JP
- Japan
- Prior art keywords
- spattering device
- spattering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12908075A JPS5266837A (en) | 1975-10-27 | 1975-10-27 | Spattering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12908075A JPS5266837A (en) | 1975-10-27 | 1975-10-27 | Spattering device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5266837A true JPS5266837A (en) | 1977-06-02 |
JPS556707B2 JPS556707B2 (en) | 1980-02-19 |
Family
ID=15000573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12908075A Granted JPS5266837A (en) | 1975-10-27 | 1975-10-27 | Spattering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5266837A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5528386A (en) * | 1978-08-21 | 1980-02-28 | Vac Tec Syst | Magnetron sputter apparatus |
JPS59177373A (en) * | 1983-03-25 | 1984-10-08 | Matsushita Electric Ind Co Ltd | Magnetron sputtering device |
JPS6059067A (en) * | 1983-08-17 | 1985-04-05 | シヤタープルーフ・グラス・コーポレーシヨン | Cathode sputtering device |
JPS63157866A (en) * | 1986-08-26 | 1988-06-30 | Mitsubishi Kasei Corp | Magnetron sputtering apparatus |
JPH01104770A (en) * | 1987-07-24 | 1989-04-21 | Miba Gleitlager Ag | Arrangement of rod-shaped magnetoelectric pipe or sputter cathode, sputtering method, apparatus for performing said method and tubular target |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6042577A (en) * | 1984-07-09 | 1985-03-06 | 松下冷機株式会社 | Voice generator for refrigerator, etc. |
JPS6042579A (en) * | 1984-07-09 | 1985-03-06 | 松下冷機株式会社 | Voice generator for completion of ice making of refrigerator |
JPS6042576A (en) * | 1984-07-09 | 1985-03-06 | 松下冷機株式会社 | Refrigerator with voice generator |
JPS6042578A (en) * | 1984-07-09 | 1985-03-06 | 松下冷機株式会社 | Voice generator for refrigerator, etc. |
-
1975
- 1975-10-27 JP JP12908075A patent/JPS5266837A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5528386A (en) * | 1978-08-21 | 1980-02-28 | Vac Tec Syst | Magnetron sputter apparatus |
JPS5855228B2 (en) * | 1978-08-21 | 1983-12-08 | ヴアツクテツク システムズ インコ−ポレ−テツド | Magnetron sputtering device |
JPS59177373A (en) * | 1983-03-25 | 1984-10-08 | Matsushita Electric Ind Co Ltd | Magnetron sputtering device |
JPS6059067A (en) * | 1983-08-17 | 1985-04-05 | シヤタープルーフ・グラス・コーポレーシヨン | Cathode sputtering device |
JPS63157866A (en) * | 1986-08-26 | 1988-06-30 | Mitsubishi Kasei Corp | Magnetron sputtering apparatus |
JPH01104770A (en) * | 1987-07-24 | 1989-04-21 | Miba Gleitlager Ag | Arrangement of rod-shaped magnetoelectric pipe or sputter cathode, sputtering method, apparatus for performing said method and tubular target |
Also Published As
Publication number | Publication date |
---|---|
JPS556707B2 (en) | 1980-02-19 |
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