JPS5244298B2 - - Google Patents
Info
- Publication number
- JPS5244298B2 JPS5244298B2 JP47122349A JP12234972A JPS5244298B2 JP S5244298 B2 JPS5244298 B2 JP S5244298B2 JP 47122349 A JP47122349 A JP 47122349A JP 12234972 A JP12234972 A JP 12234972A JP S5244298 B2 JPS5244298 B2 JP S5244298B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20960871A | 1971-12-20 | 1971-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4869733A JPS4869733A (ja) | 1973-09-21 |
| JPS5244298B2 true JPS5244298B2 (ja) | 1977-11-07 |
Family
ID=22779479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47122349A Expired JPS5244298B2 (ja) | 1971-12-20 | 1972-12-06 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3746502A (ja) |
| JP (1) | JPS5244298B2 (ja) |
| GB (1) | GB1411236A (ja) |
| NL (1) | NL7214957A (ja) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5274580A (en) * | 1975-12-19 | 1977-06-22 | Hitachi Ltd | Boat for vacuum evaporation |
| US5596673A (en) * | 1994-11-18 | 1997-01-21 | Xerox Corporation | Evaporation crucible assembly |
| US5582393A (en) * | 1995-04-21 | 1996-12-10 | Xerox Corporation | Method to maintain the levelness of a heated crucible |
| US5671322A (en) * | 1996-01-17 | 1997-09-23 | Advanced Ceramics Corporation | Lateral flash evaporator |
| DE10085115T1 (de) * | 1999-10-22 | 2002-11-07 | Kurt J Lesker Company Clairton | Verfahren und Vorrichtung zum Beschichten eines Substrats im Vakuum |
| WO2003079420A1 (en) * | 2002-03-19 | 2003-09-25 | Innovex. Inc. | Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire |
| EP1408135A1 (en) * | 2002-10-08 | 2004-04-14 | Galileo Vacuum Systems S.R.L. | Apparatus for physical vapour deposition |
| US20040007183A1 (en) * | 2002-07-11 | 2004-01-15 | Ulvac, Inc. | Apparatus and method for the formation of thin films |
| JP2006225757A (ja) * | 2005-01-21 | 2006-08-31 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JP2007039791A (ja) * | 2005-06-29 | 2007-02-15 | Fujifilm Corp | リフレクタ、それを備えた加熱用るつぼおよび放射線像変換パネルの製造方法 |
| EP1967605A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation tube and evaporation apparatus with adapted evaporation characteristic |
| EP1967606A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with adapted evaporation characteristic |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US964871A (en) * | 1910-02-04 | 1910-07-19 | Crucible Steel Co America | Furnace for reducing metallic oxids. |
| NL6913693A (ja) * | 1968-09-13 | 1970-03-17 |
-
1971
- 1971-12-20 US US00209608A patent/US3746502A/en not_active Expired - Lifetime
-
1972
- 1972-11-06 NL NL7214957A patent/NL7214957A/xx not_active Application Discontinuation
- 1972-12-06 JP JP47122349A patent/JPS5244298B2/ja not_active Expired
- 1972-12-18 GB GB5824572A patent/GB1411236A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4869733A (ja) | 1973-09-21 |
| NL7214957A (ja) | 1973-02-26 |
| GB1411236A (en) | 1975-10-22 |
| US3746502A (en) | 1973-07-17 |