TW574396B - Method and apparatus for coating a substrate in a vacuum - Google Patents

Description

574396 Case No. 89122148 Amendment

V. Description of the invention (1) The invention of the invention relates to the material coating method, and more specifically, to the device and method for coating the substrate with a deposition material. Stomach coating material is coated on the substrate. Generally, the wrinkle of the deposition material is lower than the temperature after the deposition material evaporates. The production of substrates is based on organic materials. At least one side of the film-like substrate needs to be coated. Small and flat materials are mostly organic. The base material :: plastic :; coating, most of the appearance is flat, but the surface ★ two: glass, plastic, high scores, due to the current technical limitations of materials ,: τ non-planar. By square inches. The size of the composite material is generally coated with an organic material as the base-a light-emitting diode as the substrate, an organic material 2'1 and a base 2, organic materials, etc., generally under a vacuum environment. The integrated material circuit shown in Figure-the point-type material source hanging steel A, or material, / Λdeposited material 'Using the hanging steel, the deposition material is applied to the base material. The material is from a point source: up. After heating the material, it is' evaporated and released. The substrate D is generally clamped at the outlet ^ Jin release release & column C rotation, while the substrate is placed or held in the summer For the large crucible A, a part of the material is then coated to form a coating on the surface side E toward the point material source. On the plane side E of the earth material D, and in some application examples, all non-uniform hooks Beam distribution. Examples of point sources that can produce Gaussian point sources include Re D. $ 5 pages_case number 891221

574396 V. Description of the invention (2) Ma t h i s ship shape, κ n u d s e η cell shape, source of deposition material of induction furnace. $ ’Both the point source and the improved point source have defects in their design. First, ‘to control the evaporation rate of the material, we need to control the material temperature and temperature gradient sensitively and accurately with low specific heat and poor thermal conductivity materials’. Point type / I Gaussian material sources generally use a radial reflector, thermal insulation materials, and baffle plates, so that metals and salts can produce a good evaporation I rate between 1000 and 2000 ° C. However, this material source will come from the material source for materials with a lower evaporation temperature (100 to 600 ° C); out of: = material is a substrate. A vacuum system needs π f to destroy the coating on the substrate. Layer, at this time the whole has ::, dead and v to clean up the evaporation of the material 沓 a a a company A 1 Wen Yili on the outlet hole, ΐ ΐ accumulated in the point type or improved point type deposition material The evaporated product of the source will change or even close the outlet hole. U, the coating drawer of the substrate is returned to the inside of the heated crucible, and then sprayed onto the substrate 'image will also make the coating' coarse: soil :: This is damaged, θ shows I holes for this spray. Deposits in the exit holes may increase, or even cause needle unevenness throughout the coating. 、 Also θ changes the release distribution of the stream beam, causing the I stream of the coating: Another disadvantage of the type ㈡ hanging steel is that it is not uniform. Point-type material source hanging as shown in the second figure 'stream beam angle α, line pin to Ll, L 乂 fishing: the extension hole from the exit hole to the stream beam normal column' such as: angle 'where Li, L2, L The way to do this is to increase the number of points. Keep the house low φ — ^ Only the source of the pot: the angle of the beam, such as ...

574396 fix

Case No. 89122148 V. Description of Invention (4) ::: 1 fee. If the coating material after evaporation has not been deposited on the substrate, the coating material is required for the coating process, which is not only expensive but also has material ®. Only 1 to 10 cubic centimeters of sedimentary material can be filled at one time. Therefore, the sedimentary material filled by the mother and the child can only be coated with a small amount of beauty. After that, the vacuum tank must be opened and the straight soil must be vacuumed. The purpose of the invention is to provide a coating device tray method. The force: increase the coating base in the case of coating distance; the ruler reduces the loading down time and cleans up. Time earth material surface 'In order to solve the disadvantages of traditional coating equipment, the author applied a vacuum coating material on the substrate ^ ^ Preparations include-vacuum #, and a vacuum source. This vacuum coating equipment source Including a body extending in the longitudinal direction, a source of two materials. This material source forms an internal cavity to release the member longitudinally; the exit hole of this hole. The present invention does not have a bit ^ to allow fluid to pass through this internal space- The substrate 1 to be coated is flat = :: near the heat source. It is placed inside the vacuum tank, and the coating distance of the hole when the width of the longitudinal axis of the wide body remains unchanged. Side to exit of long longitudinal release member The width is equal to the material source body ’s sedimentary material under the condition of the formula. The material source material is filled in the organic source material and organic compound = internal ° 卩 28. The deposition material is selected by the source material.

"Revision", ", and release it along the material source. The long longitudinal release member of the body 'through the outlet hole side material source body is a wall and ~ opposite end walls, and its sloping groove includes two longitudinally oriented The internal space of the extended source &#; forms a material between the extended side wall and the end wall = forming ~ upper end and ~ its =, the number of heating elements of the body that enters one end near the exit hole and the base; the heat source is The heating coil is placed along the second length of the material source body: the number of heating elements at the base. The outlet hole can be continuously extended by the inner part of the material source body and the release member. The rib plate is located at the material source and can include the first hole. And: the fluid can pass through it ;; :: the duct forms an internal cavity, and the formed-exit hole can be connected with the inner cavity of the upper part. The-duct or the _s outlet formed by the first duct The holes are aligned, the holes are arranged in an unaligned manner, and the outlet program control device that can be formed by a second conduit can be connected to the material source body. One step: a type of coating the substrate with a material source and a vacuum tank method Include the following steps to extend the second:-set the material in a vacuum tank. This material source includes a longitudinal release member in the longitudinal direction; this material source and formation-inside. The exit hole of the cavity. B. The substrate is placed in the vacuum tank facing the exit hole ', the exit hole is formed by the material source body; C. the deposition material is filled in the internal space formed by the material source body

574396

Description of the invention (6) In the cavity, d · Extract a vacuum from the vacuum tank; e · Heat the deposition material, inside the internal cavity of this deposition material position; Make the body shape f · Release the evaporated deposition material along the material release member Go out; and longitudinal release g. Move the substrate towards the evaporated deposition material. After the substrate can be coated at a fixed speed to the material that has already been sprayed, the substrate can be moved to another system: material = moving. When the substrate is vacuum, then the substrate to be coated on the substrate is re-extracted, and the product is a mixture of two materials on the substrate, including two; the body is changed into steel; r can let the flow == The empty woman is placed near the two bodies, and the body is aligned with a common vertical axis to form a ",," source; and the two controllers can be connected to the material tracer @ ^ ,, 'σ release member. A process-controlled internal cavity Designed to accept the deposition body, which is selected from the base material and organic compounds of the two bodies., Χ, This deposition material consists of: 另 The deposition material can be applied to a source in a vacuum environment, including -The body that extends in the longitudinal direction, the base of the body 2: the material fluid on it passes out of this internal cavity ^, and 4 = the text can be placed near the body

Page 10 574396 _Case No. 89122148_year month_f ^ L · _ 5. Description of the invention (7) Heat source. The exit hole may extend continuously along the longitudinal release member of the material source body. The ribs are located within an internal cavity formed by the material source body. The material source includes a body, which is an open slot, and has two longitudinally extending side walls and a pair of end walls, wherein the longitudinally extending side walls and the end wall form an internal cavity between the bodies.

The source of material may also include a first conduit that forms an internal cavity and a first outlet hole through which fluid can pass through the internal cavity. The body is a second conduit which is located in the internal cavity of the first conduit. The heat source may be disposed near the first duct or near the second duct. The heat source includes a first layer of thermally conductive insulating material, a second layer of thermally conductive material, and a third layer of thermally conductive insulating material. The first exit hole formed by the first duct may be aligned with the exit hole formed by the second duct, or the first exit hole formed by the first duct may be aligned with the exit hole formed by the second duct in an unaligned manner. These and other advantages of the present invention will be further explained in the detailed description of the preferred embodiment of the present invention, and the following drawings will be referred to during the description, and the code of each element will be used throughout the text. Schematic description

The first picture is a side view of a traditional point-type material source crucible; the second picture is a side view of the traditional point-type material source crucible, but the substrate near the crucible is enlarged; the third picture is A perspective view of a cross section of a material source according to a preferred embodiment of the present invention; a fourth view is an end view of a cross section of the material source of the third view; a fifth view is a side view of a cross section of the material source of the third and fourth views;

Page 11 743% 743%-V. Description of the invention 6th release release; 7th figure; 10th view of the 9th tenth tenth heating wire with an eighth shift angle, tenth preferred third 10 , The third one four. Deposit his proper body 1 (shown in the third figure of the opposite end wall; however, the tenth conduit three is clearly based on the trough-shaped substrate-shaped crucible longitudinal axis 16 to cover the three lower sides, and the side is five figures A perspective view of the release stream shown above, the body longitudinally releases the member and extends axially only above the two material sources in the vacuum tank, as shown in Figure 7, arranged in a partial view in the vacuum tank; multiple materials of the embodiment The top view of the source; the perspective view of the material source of the example; and the resistance case number 89122U8 located on the outer surface of the first conduit. (8) The picture shows the third to the first column along the material source. The picture shows the fifth picture. The fifth figure to the fourth material source are side views of the second figure of the present invention, the third real figure of the present invention is a perspective view of the first conduit; the first figure is the tenth figure and the second conduit is located at the first and third figures. The detailed description of the example to the eighth figure shows that the material 14 of the material source 10 is selected from organic-based materials. The groove 5, the body 16 are along the best case, the body 20 and the base 22 are shown, In the best case, in the better case, the first catheter is cut into one figure. The inside of the end; and a side view of the material source section of the example. The material source hanging pot 12 of one embodiment of the invention is used to evaporate and deposit material and organic compounds, or the pot 12 generally includes an elongated, The upper part L extends. For example, the third and sixth figures include the opposite longitudinal side walls 18, and the pieces together form the body structure. For example, the wall 18 and the end wall 20 have the same wide wall 18. The length SL is greater than End wall 2〇

$ 12 pages 574396 Correction 8912214 «V. The length EL of the description of the invention (9), as shown in the seventh figure. Because the length SL of the side wall 8 is longer than the length EL of the end wall 20 ', the body 16 has a release member which is longer in the longitudinal direction and shorter in the lateral direction, and its longitudinal length is approximately equivalent to the length EL of the end wall 20. In addition, in the best case, the length of the side wall of the grooved crucible 2 is longer than the substrate to be coated = 4, for example, when the 12 inch square substrate 2 is coated, the length of the side wall 8 is 8 I 5 inches, as shown in Figure 7. With reference to the third to fourth figures, the longitudinal side wall 18, the end wall 20, and the base 22 of the body 16 together form an internal cavity 26 and an outlet hole 2 7; as shown in the fifth figure and the seventh figure, the 'body 1 6 of The base 2 2 further forms a rib 28; the rib is attached to the inner cavity 26, and the rib 28 is also located on the first surface of the base 22. In the best case, the rib 2 8 is on the side wall 1 8 rooms extended. For example, the ribbed plate 2 8 can be combined with the main body 16 to reduce the cost of the ribbed plate 12 so that the trough-shaped crucible 12 can be evened out. The trough-shaped hanging steel 12 can be evened; The verticality of the vertical axis is more accurate. As shown in the fifth figure and the material, the arrangement of the plate 2 8 and the sedimentary material 14 (this deposition 〆 ′ J, | ,,, ι, the preferred loading amount 5, and less material). This makes the trough-shaped crucible 12 rotate even if it is filled at the center; the f-shaped material 1 4 and the trough-shaped crucible 12 can still slightly rotate with the axis L2 of 1000 square centimeters of the Mengate deposition material 14 The filling amount is approximately 50 to 50 ° C. In the best operation, the body 16 and the rib plate 28 are made of thermally conductive material. The material is ceramic. However, this material can evenly distribute the heat, and the best The material can be coated with a variety of materials, or other materials are acceptable. The surface of the main body 16 is as shown in FIG. 8 to increase the performance and durability of the main body 16. While rotating, such two j slots, the hanging pot 12 can also be slightly centered on the longitudinal axis l so that it is filled with different deposition materials 1 4 (this deposition material 574396

Case No. 89122148 V. Description of the invention (10) The material can be hung from multiple grooves based on inorganic materials. : Release the evaporated material along a common coating axis along r. Two ;: 2 materials can be mixed in a mixing zone 34 to more uniformly ;;,% material above. Holes 3 6 can be used to deposit the material in the mixing zone 3 4 and guide the bows as shown in Figures 3 to 4 and Figures 7 to 8; 38 is located near the body 16; In the case, the outer surface of the niche of Du σ 2 7 ^ pieces was opened, so that the more concentrated heating element is 38; the upper edge 40; the side wall 18 is located near the exit hole 27. More than the outer side, the outer upper edge of the wall 18 is 40 to prevent various depositions. Similarly, the base 22 of the trough-shaped crucible 12 has a low temperature ==: temperature: the degree can reduce the ejection from the base 22. The heating element 38 can be installed on the surface, and placed near the side wall 18. Another _ 瑁 柞 $ ^ is provided in the interior or shown), plus 4 pieces at this time; can be heated by a bulb (not shown U can also be the base 22 of the ionization trough ㈣ 12-even temperature probe 44 placed; ^ The wire 42 is connected to the heating element 38. A thermoelectric thermocouple temperature probe? 4 = 12: nearby; in a better case, "connected to the sensing instrument" near the base 22. The thermocouple temperature probe 4 5 The other process controllers that control the coating process are under appropriate power control values. With proper control of the deposition handle, the deposition material 14 can be heated to a preset head for control, and the release of Shen 4 1 4 is used, such as the use of quartz crystals Starting holding material 14 can reach the preset speed at a controlled speed

Page 14 574396 _ __ Case No. 89122148 V. Description of the Invention (12) 74 is located near the outer surface 76 of the first duct 56.

As shown in the twelfth figure, the second duct 66 or other structure that can form an internal cavity can form an outlet hole through which the fluid can pass. Inside the cavity 68. The first guide 66 is designed to receive a deposition material 14, which can be based on an inorganic material or other materials; the second duct 66 can generally form a second internal cavity 70, and a The second outlet holes 27 ,, which flow through the second internal cavity. Both the first duct 56 and the second duct 66 are made of ceramic or other suitable materials. The arrangement of the first duct and the second duct can align or offset the central axis C1 of the first guide f 56 and the central axis C2 of the second guide duct 66. The second outlet holes 27 ,, may be aligned with the outlet holes 2 ^ formed by the first conduit; another method is that the outlet holes 27 ,, may be aligned with the outlet holes 27 in a misaligned manner. So that the exit hole 27 ″ formed by the first duct 56 and the second exit hole 27 formed by the second duct 66 ′ will not be between the second duct 66 of the accepted deposition material 1 4 and There are linear small channels SP between the substrates W. In order to help the alignment of the first duct 56 and the second duct 66, a support rod 72 made of quartz or other suitable materials can be selected, and the support rod 72 is placed on the opposite side of the first duct 56. 8 ,, 60. In addition, an additional second conduit 66 can be used to allow the second conduit = bleed through, and this additional second conduit 66 is also installed at the second block. L: The third embodiment of the present invention is clearly shown. Electric Contains a second > a ## 代 电阻 热热 器 7 [Resistance heating element 74, each of which is a thermally conductive insulating material 78, such as hafnium oxide, the second layer

Page 16 5? 4396

V. Description of the invention (13) 铬 Chromium alloy or other suitable materials of resistance heating layer 80, the third layer is: = conductive insulating material 78 ,. As explained above, why is the heat shield "and the heat button 9 placed near the third layer of thermally conductive insulating material. Further to the thirteenth figure, the first duct 56 and the second duct 66 are placed. The end plate 5 8 corresponding to the end plate in 56 and the second duct 66: the end of the opposite end of the pair [α activity ... combined; and the second duct is wound around the rod 88 through the first guide; 56 two: two ^ ° &. The cymbal plate 58, which is surrounded by the bush 90 and surrounded by the general manager, Ang et al. Lu 56, and extended from the corresponding second plate = j plate 84. The second rod 88, also by the lining The sleeve 90, the second guide looped through the end plate 60 of a duct 56, extends from the corresponding branch ridge. The second rod 88 is formed by a grooved support arm 92 connected to the base. 64. The heat shield "〇 用 ^ ^ = The heat shield 96 of the heat shield 94 has been explained before thinning. 10 ,, ;; ^ = electrode 98 passes the material source edge of the third embodiment of the present invention; this insulation "I4, two jade 98 with insulating material 100 and the base 64 to maintain the insulation resistance heating element 74, to: ceramic or Are other suitable materials. The electrodes 98 and 98 are connected together with a movable side 1 * and a source line 42. The electric clip 102 connects the electric Lewan type to the first conduit 56. Cover; Examples; The substrate 24 can be coated with a material source 10, ^ 〇 barrier / brother: using a trough-shaped hanging pot 12, a hollow tube 56, and the first example for the sake of clarity. Unless there is a special statement, the first Place the deposition: the operation method of the item in the figure 'The accumulation process 14 is placed in the material source i during the coating process, and then one or =

Page 17 574396 _Case No. 89122148_ Year, month, day, and correction diagrams Brief description 1 0, 1 0 ', 1 0' ': Source of material 1 2: Groove crucible 1 4: Deposition material 16, 16': Body 1 8: longitudinal side wall 20: end wall 2 2: base 2 4: base material 26, 68, 70: internal cavity

27, 27 ', 27' ', 27' '': Outlet hole 2 8: Rib plate 3 4: Mixing zone 3 6: Hole 3 8, 3 8 ': Heating element 4 0: Outer upper edge 4 2, 4 2 ': Power cord 4 4, 4 4': Thermocouple temperature probe 4 5: Control instrument

4 6: Point-type material source hanging pot 48: Vacuum tank 5 2: Flow column 5 4: Upper corner 56: First duct 56 ’′: Hollow duct

Page 21 574396 Case No. 89122148 Modified drawing simple description 58, 60, 84, 86: end plate 6 2: support rod 64: base 66: second conduit 74, 74 ', 74' ': resistance heating Element 76: Outer surface 78, 78 ': Thermally conductive insulating material 80: Resistance heating layer 88: Rod

8 8 ′: second rod 9 0, 9 0 ′: bushing 9 2: support arm 9 4: heat shield 9 6: thermal insulation button 9 8 · electrode 1 0 0 · insulating material 1 02: electric clamp

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Claims (1)

574396 _Case No. 89122148_ Year Month Date__ VI. Patent Application Range 8. The vacuum coating device described in item 7 of the patent application range, wherein the heat source is a heat source at the upper end of the body that is larger than the body. This base has a heating coil with more heating elements. 9. The vacuum coating device according to item 1 of the scope of patent application, further comprising a program control device which can be connected to the body of the material source. 10. The vacuum coating device according to item 1 of the scope of patent application, wherein the outlet hole can continuously extend along the long longitudinal release member of the body. 1 1. The vacuum coating device according to item 1 of the scope of patent application, further comprising a rib plate located in the internal cavity of the body from the material source. 1 2. The vacuum coating device according to item 1 of the scope of patent application, wherein the shape of the body is an open groove, which includes two side walls extending in the longitudinal direction and a pair of end walls, wherein the side walls extending in the longitudinal direction and The inner space of the body is formed between the end walls. 1 3 · The vacuum coating device according to item 1 of the scope of patent application, further comprising a first duct, the first duct forming an internal cavity, and a first duct through which fluid can pass through the internal cavity. The body is A second conduit is located in the internal cavity of the first conduit. 14. The vacuum coating device according to item 13 of the scope of the patent application, wherein the first outlet hole formed by the first conduit and the outlet hole formed by the second conduit are aligned with each other. 15. The vacuum coating device according to item 13 of the scope of the patent application, wherein the first outlet hole formed by the first conduit and the outlet hole formed by the second conduit may be arranged in an unaligned manner. 16. A vacuum coating method for coating a deposition material on a substrate, comprising: Page 24 574396 _Case No. 89122148_Year_Month__ VI. Patent application scope The following steps: Install the material source in the vacuum tank, the material source has a body extending in the longitudinal direction and a long longitudinal release member And form an internal cavity, an outlet hole through which the fluid can pass, an upper end adjacent to the outlet hole, and a base portion; placing a substrate in the vacuum tank facing the outlet hole Position, the exit hole is formed by the body of the material source, and the deposition material is filled in the internal cavity of the body by the material source; Vacuum is applied to the vacuum tank; the deposition material is heated, and the deposition material located in the internal cavity of the body of the material source is heated by a heat source, which can cause the temperature of the material source and the base portion to be lower than the material source The temperature of the upper end portion, and generate a vertical temperature gradient inside the material source; release the evaporated deposition material along the long longitudinal release member of the body; and pass the substrate through the evaporated Material is deposited while moving. 1 7. A method for coating a substrate using the material source and the vacuum tank described in item 16 of the scope of the patent application, wherein the substrate can be moved at a fixed speed through the evaporated deposition material. 1 8. A source of material coated on a substrate with a deposition material, the source of material comprising: two bodies, both bodies forming an internal cavity, and at least one outlet through which fluid can pass through the internal cavity Hole, where the two bodies pair Page 25574396 _ Case No. 89122148 _ Month and Day __ VI. The scope of patent application is a common longitudinal axis to form a long longitudinal release member, and each of the exit holes formed by the two bodies is misaligned. Arranged in a manner; and a heat source placed near each of the two bodies and extending along each of the two bodies. 19. The material source according to item 18 of the scope of patent application, wherein the two bodies are point-type material source steel. 20. The material source as described in item 18 of the patent application scope, wherein the two bodies are improved point-type material source crucibles. 2 1. The material source described in item 18 of the scope of patent application, further comprising a process controller that can be connected to one of the two bodies of the material source. 2 2. The material source according to item 18 of the scope of patent application, wherein the internal cavity formed by the two bodies is designed to accept a deposition material; the deposition material is selected from organic base chemicals and organic compounds. Page 26