GB1411236A - Evaporation crucible - Google Patents
Evaporation crucibleInfo
- Publication number
- GB1411236A GB1411236A GB5824572A GB5824572A GB1411236A GB 1411236 A GB1411236 A GB 1411236A GB 5824572 A GB5824572 A GB 5824572A GB 5824572 A GB5824572 A GB 5824572A GB 1411236 A GB1411236 A GB 1411236A
- Authority
- GB
- United Kingdom
- Prior art keywords
- tube
- dec
- evaporation crucible
- crucible
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
1411236 Evaporation crucible XEROX CORP 18 Dec 1972 [20 Dec 1971] 58245/72 Heading B1B [Also in Division F4] A crucible 10 comprises an elongated metal tube 11 having an outlet port in the form of one or more slots 12 evenly spaced along the upper surface, the bottom of the tube being divided into compartments 14 by plates or dams 15. The tube is attached at the end to metal plates 16, 17 serving as electric terminals and supports. The tube is filled with liquid to be evaporated and is heated resistively by current passed between its ends.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20960871A | 1971-12-20 | 1971-12-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1411236A true GB1411236A (en) | 1975-10-22 |
Family
ID=22779479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5824572A Expired GB1411236A (en) | 1971-12-20 | 1972-12-18 | Evaporation crucible |
Country Status (4)
Country | Link |
---|---|
US (1) | US3746502A (en) |
JP (1) | JPS5244298B2 (en) |
GB (1) | GB1411236A (en) |
NL (1) | NL7214957A (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5274580A (en) * | 1975-12-19 | 1977-06-22 | Hitachi Ltd | Boat for vacuum evaporation |
US5596673A (en) * | 1994-11-18 | 1997-01-21 | Xerox Corporation | Evaporation crucible assembly |
US5582393A (en) * | 1995-04-21 | 1996-12-10 | Xerox Corporation | Method to maintain the levelness of a heated crucible |
US5671322A (en) * | 1996-01-17 | 1997-09-23 | Advanced Ceramics Corporation | Lateral flash evaporator |
EP1246951A4 (en) * | 1999-10-22 | 2004-10-13 | Kurt J Lesker Company | Method and apparatus for coating a substrate in a vacuum |
AU2003210049A1 (en) * | 2002-03-19 | 2003-09-29 | Innovex. Inc. | Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire |
EP1408135A1 (en) * | 2002-10-08 | 2004-04-14 | Galileo Vacuum Systems S.R.L. | Apparatus for physical vapour deposition |
US20040007183A1 (en) * | 2002-07-11 | 2004-01-15 | Ulvac, Inc. | Apparatus and method for the formation of thin films |
JP2006225757A (en) * | 2005-01-21 | 2006-08-31 | Mitsubishi Heavy Ind Ltd | Vacuum vapor deposition apparatus |
JP2007039791A (en) * | 2005-06-29 | 2007-02-15 | Fujifilm Corp | Reflector, heating crucible equipped with the reflector, and process for preparation of radiation image transforming panel |
EP1967605A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation tube and evaporation apparatus with adapted evaporation characteristic |
EP1967606A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with adapted evaporation characteristic |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US964871A (en) * | 1910-02-04 | 1910-07-19 | Crucible Steel Co America | Furnace for reducing metallic oxids. |
NL6913693A (en) * | 1968-09-13 | 1970-03-17 |
-
1971
- 1971-12-20 US US00209608A patent/US3746502A/en not_active Expired - Lifetime
-
1972
- 1972-11-06 NL NL7214957A patent/NL7214957A/xx not_active Application Discontinuation
- 1972-12-06 JP JP47122349A patent/JPS5244298B2/ja not_active Expired
- 1972-12-18 GB GB5824572A patent/GB1411236A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7214957A (en) | 1973-02-26 |
US3746502A (en) | 1973-07-17 |
JPS4869733A (en) | 1973-09-21 |
JPS5244298B2 (en) | 1977-11-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |