JPS5238055U - - Google Patents

Info

Publication number
JPS5238055U
JPS5238055U JP12430175U JP12430175U JPS5238055U JP S5238055 U JPS5238055 U JP S5238055U JP 12430175 U JP12430175 U JP 12430175U JP 12430175 U JP12430175 U JP 12430175U JP S5238055 U JPS5238055 U JP S5238055U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12430175U
Other languages
Japanese (ja)
Other versions
JPS5255411Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975124301U priority Critical patent/JPS5255411Y2/ja
Publication of JPS5238055U publication Critical patent/JPS5238055U/ja
Application granted granted Critical
Publication of JPS5255411Y2 publication Critical patent/JPS5255411Y2/ja
Expired legal-status Critical Current

Links

JP1975124301U 1975-09-08 1975-09-08 Expired JPS5255411Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975124301U JPS5255411Y2 (https=) 1975-09-08 1975-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975124301U JPS5255411Y2 (https=) 1975-09-08 1975-09-08

Publications (2)

Publication Number Publication Date
JPS5238055U true JPS5238055U (https=) 1977-03-17
JPS5255411Y2 JPS5255411Y2 (https=) 1977-12-14

Family

ID=28604831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975124301U Expired JPS5255411Y2 (https=) 1975-09-08 1975-09-08

Country Status (1)

Country Link
JP (1) JPS5255411Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015954U (https=) * 1973-06-09 1975-02-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015954U (https=) * 1973-06-09 1975-02-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置

Also Published As

Publication number Publication date
JPS5255411Y2 (https=) 1977-12-14

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