JPS5255411Y2 - - Google Patents
Info
- Publication number
- JPS5255411Y2 JPS5255411Y2 JP1975124301U JP12430175U JPS5255411Y2 JP S5255411 Y2 JPS5255411 Y2 JP S5255411Y2 JP 1975124301 U JP1975124301 U JP 1975124301U JP 12430175 U JP12430175 U JP 12430175U JP S5255411 Y2 JPS5255411 Y2 JP S5255411Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975124301U JPS5255411Y2 (ja) | 1975-09-08 | 1975-09-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975124301U JPS5255411Y2 (ja) | 1975-09-08 | 1975-09-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5238055U JPS5238055U (ja) | 1977-03-17 |
JPS5255411Y2 true JPS5255411Y2 (ja) | 1977-12-14 |
Family
ID=28604831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1975124301U Expired JPS5255411Y2 (ja) | 1975-09-08 | 1975-09-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5255411Y2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58135643A (ja) * | 1982-02-08 | 1983-08-12 | Nippon Telegr & Teleph Corp <Ntt> | ウエハ洗浄装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015954U (ja) * | 1973-06-09 | 1975-02-20 |
-
1975
- 1975-09-08 JP JP1975124301U patent/JPS5255411Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015954U (ja) * | 1973-06-09 | 1975-02-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS5238055U (ja) | 1977-03-17 |