JPS5238055U - - Google Patents

Info

Publication number
JPS5238055U
JPS5238055U JP12430175U JP12430175U JPS5238055U JP S5238055 U JPS5238055 U JP S5238055U JP 12430175 U JP12430175 U JP 12430175U JP 12430175 U JP12430175 U JP 12430175U JP S5238055 U JPS5238055 U JP S5238055U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12430175U
Other versions
JPS5255411Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975124301U priority Critical patent/JPS5255411Y2/ja
Publication of JPS5238055U publication Critical patent/JPS5238055U/ja
Application granted granted Critical
Publication of JPS5255411Y2 publication Critical patent/JPS5255411Y2/ja
Expired legal-status Critical Current

Links

JP1975124301U 1975-09-08 1975-09-08 Expired JPS5255411Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975124301U JPS5255411Y2 (ja) 1975-09-08 1975-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975124301U JPS5255411Y2 (ja) 1975-09-08 1975-09-08

Publications (2)

Publication Number Publication Date
JPS5238055U true JPS5238055U (ja) 1977-03-17
JPS5255411Y2 JPS5255411Y2 (ja) 1977-12-14

Family

ID=28604831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975124301U Expired JPS5255411Y2 (ja) 1975-09-08 1975-09-08

Country Status (1)

Country Link
JP (1) JPS5255411Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015954U (ja) * 1973-06-09 1975-02-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015954U (ja) * 1973-06-09 1975-02-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置
JPH045264B2 (ja) * 1982-02-08 1992-01-30

Also Published As

Publication number Publication date
JPS5255411Y2 (ja) 1977-12-14

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