JPS5236676B2 - - Google Patents
Info
- Publication number
- JPS5236676B2 JPS5236676B2 JP47106342A JP10634272A JPS5236676B2 JP S5236676 B2 JPS5236676 B2 JP S5236676B2 JP 47106342 A JP47106342 A JP 47106342A JP 10634272 A JP10634272 A JP 10634272A JP S5236676 B2 JPS5236676 B2 JP S5236676B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Formation Of Insulating Films (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20338571A | 1971-11-30 | 1971-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4864885A JPS4864885A (en:Method) | 1973-09-07 |
| JPS5236676B2 true JPS5236676B2 (en:Method) | 1977-09-17 |
Family
ID=22753767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47106342A Expired JPS5236676B2 (en:Method) | 1971-11-30 | 1972-10-25 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3796955A (en:Method) |
| JP (1) | JPS5236676B2 (en:Method) |
| DE (1) | DE2257649C3 (en:Method) |
| FR (1) | FR2161968B1 (en:Method) |
| GB (1) | GB1380287A (en:Method) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57164534A (en) * | 1981-04-03 | 1982-10-09 | Nec Corp | Screening method for semiconductor element |
| US4816753A (en) * | 1987-05-21 | 1989-03-28 | Advanced Research And Applications Corporation | Method for reliability testing of integrated circuits |
| US5498974A (en) * | 1994-12-30 | 1996-03-12 | International Business Machines Corporation | Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus |
| AU6956196A (en) * | 1995-08-23 | 1997-03-27 | Gregory J. Gormley | Method and apparatus for testing and measuring for porosity and anomalies of nonconductive materials using electron beam |
| US6005409A (en) * | 1996-06-04 | 1999-12-21 | Advanced Micro Devices, Inc. | Detection of process-induced damage on transistors in real time |
| US6356097B1 (en) * | 1997-06-20 | 2002-03-12 | Applied Materials, Inc. | Capacitive probe for in situ measurement of wafer DC bias voltage |
| US6891359B2 (en) * | 2003-01-24 | 2005-05-10 | International Business Machines Corporation | Circuitry and methodology to establish correlation between gate dielectric test site reliability and product gate reliability |
-
1971
- 1971-11-30 US US00203385A patent/US3796955A/en not_active Expired - Lifetime
-
1972
- 1972-10-25 JP JP47106342A patent/JPS5236676B2/ja not_active Expired
- 1972-11-06 GB GB5111772A patent/GB1380287A/en not_active Expired
- 1972-11-08 FR FR7240417A patent/FR2161968B1/fr not_active Expired
- 1972-11-24 DE DE2257649A patent/DE2257649C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2257649C3 (de) | 1981-02-19 |
| FR2161968B1 (en:Method) | 1974-08-19 |
| US3796955A (en) | 1974-03-12 |
| DE2257649B2 (de) | 1980-06-12 |
| FR2161968A1 (en:Method) | 1973-07-13 |
| DE2257649A1 (de) | 1973-06-07 |
| GB1380287A (en) | 1975-01-08 |
| JPS4864885A (en:Method) | 1973-09-07 |