FR2161968A1 - - Google Patents

Info

Publication number
FR2161968A1
FR2161968A1 FR7240417A FR7240417A FR2161968A1 FR 2161968 A1 FR2161968 A1 FR 2161968A1 FR 7240417 A FR7240417 A FR 7240417A FR 7240417 A FR7240417 A FR 7240417A FR 2161968 A1 FR2161968 A1 FR 2161968A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7240417A
Other languages
French (fr)
Other versions
FR2161968B1 (en:Method
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2161968A1 publication Critical patent/FR2161968A1/fr
Application granted granted Critical
Publication of FR2161968B1 publication Critical patent/FR2161968B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Formation Of Insulating Films (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR7240417A 1971-11-30 1972-11-08 Expired FR2161968B1 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20338571A 1971-11-30 1971-11-30

Publications (2)

Publication Number Publication Date
FR2161968A1 true FR2161968A1 (en:Method) 1973-07-13
FR2161968B1 FR2161968B1 (en:Method) 1974-08-19

Family

ID=22753767

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7240417A Expired FR2161968B1 (en:Method) 1971-11-30 1972-11-08

Country Status (5)

Country Link
US (1) US3796955A (en:Method)
JP (1) JPS5236676B2 (en:Method)
DE (1) DE2257649C3 (en:Method)
FR (1) FR2161968B1 (en:Method)
GB (1) GB1380287A (en:Method)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164534A (en) * 1981-04-03 1982-10-09 Nec Corp Screening method for semiconductor element
US4816753A (en) * 1987-05-21 1989-03-28 Advanced Research And Applications Corporation Method for reliability testing of integrated circuits
US5498974A (en) * 1994-12-30 1996-03-12 International Business Machines Corporation Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus
AU6956196A (en) * 1995-08-23 1997-03-27 Gregory J. Gormley Method and apparatus for testing and measuring for porosity and anomalies of nonconductive materials using electron beam
US6005409A (en) * 1996-06-04 1999-12-21 Advanced Micro Devices, Inc. Detection of process-induced damage on transistors in real time
US6356097B1 (en) * 1997-06-20 2002-03-12 Applied Materials, Inc. Capacitive probe for in situ measurement of wafer DC bias voltage
US6891359B2 (en) * 2003-01-24 2005-05-10 International Business Machines Corporation Circuitry and methodology to establish correlation between gate dielectric test site reliability and product gate reliability

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
DE2257649C3 (de) 1981-02-19
FR2161968B1 (en:Method) 1974-08-19
US3796955A (en) 1974-03-12
DE2257649B2 (de) 1980-06-12
JPS5236676B2 (en:Method) 1977-09-17
DE2257649A1 (de) 1973-06-07
GB1380287A (en) 1975-01-08
JPS4864885A (en:Method) 1973-09-07

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Legal Events

Date Code Title Description
ST Notification of lapse