JPS5234967B2 - - Google Patents

Info

Publication number
JPS5234967B2
JPS5234967B2 JP11900773A JP11900773A JPS5234967B2 JP S5234967 B2 JPS5234967 B2 JP S5234967B2 JP 11900773 A JP11900773 A JP 11900773A JP 11900773 A JP11900773 A JP 11900773A JP S5234967 B2 JPS5234967 B2 JP S5234967B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11900773A
Other languages
Japanese (ja)
Other versions
JPS5070104A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11900773A priority Critical patent/JPS5234967B2/ja
Priority to FR7427936A priority patent/FR2249363B1/fr
Priority to DE19742439449 priority patent/DE2439449C3/de
Priority to GB3621974A priority patent/GB1479462A/en
Publication of JPS5070104A publication Critical patent/JPS5070104A/ja
Priority to US05/723,063 priority patent/US4099973A/en
Publication of JPS5234967B2 publication Critical patent/JPS5234967B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/0085—Azides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP11900773A 1973-10-24 1973-10-24 Expired JPS5234967B2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP11900773A JPS5234967B2 (enrdf_load_stackoverflow) 1973-10-24 1973-10-24
FR7427936A FR2249363B1 (enrdf_load_stackoverflow) 1973-10-24 1974-08-12
DE19742439449 DE2439449C3 (de) 1973-10-24 1974-08-16 LJchtvemetzbares Gemisch
GB3621974A GB1479462A (en) 1973-10-24 1974-08-16 Photoresist composition
US05/723,063 US4099973A (en) 1973-10-24 1976-09-14 Photo-sensitive bis-azide containing composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11900773A JPS5234967B2 (enrdf_load_stackoverflow) 1973-10-24 1973-10-24

Publications (2)

Publication Number Publication Date
JPS5070104A JPS5070104A (enrdf_load_stackoverflow) 1975-06-11
JPS5234967B2 true JPS5234967B2 (enrdf_load_stackoverflow) 1977-09-06

Family

ID=14750674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11900773A Expired JPS5234967B2 (enrdf_load_stackoverflow) 1973-10-24 1973-10-24

Country Status (3)

Country Link
JP (1) JPS5234967B2 (enrdf_load_stackoverflow)
FR (1) FR2249363B1 (enrdf_load_stackoverflow)
GB (1) GB1479462A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641432U (enrdf_load_stackoverflow) * 1979-09-06 1981-04-16
JPS63285824A (ja) * 1987-05-18 1988-11-22 Matsushita Electric Ind Co Ltd スイツチ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160139A (ja) * 1983-03-04 1984-09-10 Hitachi Ltd 感光性重合体組成物
JPS62247354A (ja) * 1986-04-17 1987-10-28 Daicel Chem Ind Ltd スクリ−ン製版用感光性樹脂組成物
US4950583A (en) * 1986-09-17 1990-08-21 Brewer Science Inc. Adhesion promoting product and process for treating an integrated circuit substrate therewith

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641432U (enrdf_load_stackoverflow) * 1979-09-06 1981-04-16
JPS63285824A (ja) * 1987-05-18 1988-11-22 Matsushita Electric Ind Co Ltd スイツチ

Also Published As

Publication number Publication date
FR2249363A1 (enrdf_load_stackoverflow) 1975-05-23
DE2439449A1 (de) 1975-05-07
JPS5070104A (enrdf_load_stackoverflow) 1975-06-11
FR2249363B1 (enrdf_load_stackoverflow) 1977-03-25
GB1479462A (en) 1977-07-13
DE2439449B2 (de) 1976-07-29

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