JPS5234967B2 - - Google Patents
Info
- Publication number
- JPS5234967B2 JPS5234967B2 JP11900773A JP11900773A JPS5234967B2 JP S5234967 B2 JPS5234967 B2 JP S5234967B2 JP 11900773 A JP11900773 A JP 11900773A JP 11900773 A JP11900773 A JP 11900773A JP S5234967 B2 JPS5234967 B2 JP S5234967B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/008—Azides
- G03F7/0085—Azides characterised by the non-macromolecular additives
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11900773A JPS5234967B2 (OSRAM) | 1973-10-24 | 1973-10-24 | |
| FR7427936A FR2249363B1 (OSRAM) | 1973-10-24 | 1974-08-12 | |
| GB3621974A GB1479462A (en) | 1973-10-24 | 1974-08-16 | Photoresist composition |
| DE19742439449 DE2439449C3 (de) | 1973-10-24 | 1974-08-16 | LJchtvemetzbares Gemisch |
| US05/723,063 US4099973A (en) | 1973-10-24 | 1976-09-14 | Photo-sensitive bis-azide containing composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11900773A JPS5234967B2 (OSRAM) | 1973-10-24 | 1973-10-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5070104A JPS5070104A (OSRAM) | 1975-06-11 |
| JPS5234967B2 true JPS5234967B2 (OSRAM) | 1977-09-06 |
Family
ID=14750674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11900773A Expired JPS5234967B2 (OSRAM) | 1973-10-24 | 1973-10-24 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5234967B2 (OSRAM) |
| FR (1) | FR2249363B1 (OSRAM) |
| GB (1) | GB1479462A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5641432U (OSRAM) * | 1979-09-06 | 1981-04-16 | ||
| JPS63285824A (ja) * | 1987-05-18 | 1988-11-22 | Matsushita Electric Ind Co Ltd | スイツチ |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59160139A (ja) * | 1983-03-04 | 1984-09-10 | Hitachi Ltd | 感光性重合体組成物 |
| JPS62247354A (ja) * | 1986-04-17 | 1987-10-28 | Daicel Chem Ind Ltd | スクリ−ン製版用感光性樹脂組成物 |
| US4950583A (en) * | 1986-09-17 | 1990-08-21 | Brewer Science Inc. | Adhesion promoting product and process for treating an integrated circuit substrate therewith |
-
1973
- 1973-10-24 JP JP11900773A patent/JPS5234967B2/ja not_active Expired
-
1974
- 1974-08-12 FR FR7427936A patent/FR2249363B1/fr not_active Expired
- 1974-08-16 GB GB3621974A patent/GB1479462A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5641432U (OSRAM) * | 1979-09-06 | 1981-04-16 | ||
| JPS63285824A (ja) * | 1987-05-18 | 1988-11-22 | Matsushita Electric Ind Co Ltd | スイツチ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5070104A (OSRAM) | 1975-06-11 |
| GB1479462A (en) | 1977-07-13 |
| DE2439449B2 (de) | 1976-07-29 |
| FR2249363B1 (OSRAM) | 1977-03-25 |
| FR2249363A1 (OSRAM) | 1975-05-23 |
| DE2439449A1 (de) | 1975-05-07 |