JPS5228276A - Method of producing semiconductor device - Google Patents

Method of producing semiconductor device

Info

Publication number
JPS5228276A
JPS5228276A JP51069890A JP6989076A JPS5228276A JP S5228276 A JPS5228276 A JP S5228276A JP 51069890 A JP51069890 A JP 51069890A JP 6989076 A JP6989076 A JP 6989076A JP S5228276 A JPS5228276 A JP S5228276A
Authority
JP
Japan
Prior art keywords
semiconductor device
producing semiconductor
producing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51069890A
Other languages
English (en)
Japanese (ja)
Inventor
Pii Etsushiyu Ronarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5228276A publication Critical patent/JPS5228276A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D64/011—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP51069890A 1975-06-30 1976-06-16 Method of producing semiconductor device Pending JPS5228276A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59199575A 1975-06-30 1975-06-30

Publications (1)

Publication Number Publication Date
JPS5228276A true JPS5228276A (en) 1977-03-03

Family

ID=24368826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51069890A Pending JPS5228276A (en) 1975-06-30 1976-06-16 Method of producing semiconductor device

Country Status (6)

Country Link
JP (1) JPS5228276A (Direct)
CA (1) CA1049157A (Direct)
DE (1) DE2621765A1 (Direct)
FR (1) FR2316745A1 (Direct)
GB (1) GB1521625A (Direct)
IT (1) IT1063563B (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112199A (en) * 1976-03-17 1977-09-20 Kyoei Kikou Kk Automatic fastening tool

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075771A (Direct) * 1973-10-31 1975-06-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075771A (Direct) * 1973-10-31 1975-06-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112199A (en) * 1976-03-17 1977-09-20 Kyoei Kikou Kk Automatic fastening tool

Also Published As

Publication number Publication date
FR2316745A1 (fr) 1977-01-28
FR2316745B1 (Direct) 1980-09-26
IT1063563B (it) 1985-02-11
DE2621765A1 (de) 1977-01-20
CA1049157A (en) 1979-02-20
GB1521625A (en) 1978-08-16

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