JPS5226173A - Manufacturing method of disc wafer casing jig - Google Patents

Manufacturing method of disc wafer casing jig

Info

Publication number
JPS5226173A
JPS5226173A JP10124175A JP10124175A JPS5226173A JP S5226173 A JPS5226173 A JP S5226173A JP 10124175 A JP10124175 A JP 10124175A JP 10124175 A JP10124175 A JP 10124175A JP S5226173 A JPS5226173 A JP S5226173A
Authority
JP
Japan
Prior art keywords
manufacturing
disc wafer
casing jig
jig
wafer casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10124175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5346670B2 (enrdf_load_stackoverflow
Inventor
Seiichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10124175A priority Critical patent/JPS5226173A/ja
Publication of JPS5226173A publication Critical patent/JPS5226173A/ja
Publication of JPS5346670B2 publication Critical patent/JPS5346670B2/ja
Granted legal-status Critical Current

Links

JP10124175A 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig Granted JPS5226173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10124175A JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10124175A JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Publications (2)

Publication Number Publication Date
JPS5226173A true JPS5226173A (en) 1977-02-26
JPS5346670B2 JPS5346670B2 (enrdf_load_stackoverflow) 1978-12-15

Family

ID=14295396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10124175A Granted JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Country Status (1)

Country Link
JP (1) JPS5226173A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254422A (ja) * 1986-04-28 1987-11-06 Fukui Shinetsu Sekiei:Kk ウエハ支持ボ−ト

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (enrdf_load_stackoverflow) * 1973-09-14 1975-05-16
JPS5062579A (enrdf_load_stackoverflow) * 1973-10-02 1975-05-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (enrdf_load_stackoverflow) * 1973-09-14 1975-05-16
JPS5062579A (enrdf_load_stackoverflow) * 1973-10-02 1975-05-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254422A (ja) * 1986-04-28 1987-11-06 Fukui Shinetsu Sekiei:Kk ウエハ支持ボ−ト

Also Published As

Publication number Publication date
JPS5346670B2 (enrdf_load_stackoverflow) 1978-12-15

Similar Documents

Publication Publication Date Title
JPS51135461A (en) Exposing-method
JPS5257527A (en) Monofil compound heater and its manufacturing method
JPS5226173A (en) Manufacturing method of disc wafer casing jig
JPS51115345A (en) Manufacturing process of heating unit
JPS5257531A (en) Sheathed heater and its manufacturing method
JPS51121651A (en) Screw and its manufacturing method
JPS52798A (en) Process for production of acteivated alumina
JPS5238094A (en) Method of producing antibiotics, mimosamycin and chlorocarcin a, b, c
GR62080B (en) Process for the fabrication of articles moulded from wood particles,disposition for the application of this method and articles obtaining by this method
JPS51140211A (en) Body frame for all-closed electric compresser
JPS5335372A (en) Beveling method of wafers
JPS51134936A (en) Solar-heat selective absorption plate and production of same
JPS5230939A (en) Microwave heating process
JPS5252062A (en) Fitting method of bushing made of synthetic resin
JPS5211801A (en) Tuner manufacturing method
JPS51118932A (en) Write-modify method of program and the device
JPS51134885A (en) Manufacturing method of electric cable
JPS51118148A (en) Heating pipe and its production method
JPS51151071A (en) Manufacturing method of a semiconductor apparatus
JPS5232144A (en) Method of manufacturing of wire heater
JPS51134681A (en) Defective material detector
JPS521247A (en) Runner fabrication method
JPS51147964A (en) Method of manufacturing semiconductor device
JPS5223883A (en) Incandescent electric bulb
JPS51119828A (en) A process for manufacturing polyester fibers