JPS5056148A - - Google Patents

Info

Publication number
JPS5056148A
JPS5056148A JP10301973A JP10301973A JPS5056148A JP S5056148 A JPS5056148 A JP S5056148A JP 10301973 A JP10301973 A JP 10301973A JP 10301973 A JP10301973 A JP 10301973A JP S5056148 A JPS5056148 A JP S5056148A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10301973A
Other languages
Japanese (ja)
Other versions
JPS5311427B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10301973A priority Critical patent/JPS5311427B2/ja
Publication of JPS5056148A publication Critical patent/JPS5056148A/ja
Publication of JPS5311427B2 publication Critical patent/JPS5311427B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP10301973A 1973-09-14 1973-09-14 Expired JPS5311427B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10301973A JPS5311427B2 (enrdf_load_stackoverflow) 1973-09-14 1973-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10301973A JPS5311427B2 (enrdf_load_stackoverflow) 1973-09-14 1973-09-14

Publications (2)

Publication Number Publication Date
JPS5056148A true JPS5056148A (enrdf_load_stackoverflow) 1975-05-16
JPS5311427B2 JPS5311427B2 (enrdf_load_stackoverflow) 1978-04-21

Family

ID=14342923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10301973A Expired JPS5311427B2 (enrdf_load_stackoverflow) 1973-09-14 1973-09-14

Country Status (1)

Country Link
JP (1) JPS5311427B2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213770A (en) * 1975-07-22 1977-02-02 Furuarouuea Inc Waferrbascket
JPS5226173A (en) * 1975-08-22 1977-02-26 Hitachi Ltd Manufacturing method of disc wafer casing jig
JPS5285476A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Semiconductor wafer accommodating jig
JPS54140656U (enrdf_load_stackoverflow) * 1978-03-22 1979-09-29
JPS5577141A (en) * 1978-12-07 1980-06-10 Nec Corp Etching method
JPS5761831U (enrdf_load_stackoverflow) * 1980-09-30 1982-04-13

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213770A (en) * 1975-07-22 1977-02-02 Furuarouuea Inc Waferrbascket
JPS5226173A (en) * 1975-08-22 1977-02-26 Hitachi Ltd Manufacturing method of disc wafer casing jig
JPS5285476A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Semiconductor wafer accommodating jig
JPS54140656U (enrdf_load_stackoverflow) * 1978-03-22 1979-09-29
JPS5577141A (en) * 1978-12-07 1980-06-10 Nec Corp Etching method
JPS5761831U (enrdf_load_stackoverflow) * 1980-09-30 1982-04-13

Also Published As

Publication number Publication date
JPS5311427B2 (enrdf_load_stackoverflow) 1978-04-21

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