JPS5226154A - Scanning particles microscopes - Google Patents

Scanning particles microscopes

Info

Publication number
JPS5226154A
JPS5226154A JP50102169A JP10216975A JPS5226154A JP S5226154 A JPS5226154 A JP S5226154A JP 50102169 A JP50102169 A JP 50102169A JP 10216975 A JP10216975 A JP 10216975A JP S5226154 A JPS5226154 A JP S5226154A
Authority
JP
Japan
Prior art keywords
microscopes
field
visula
scanning
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50102169A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5548428B2 (enrdf_load_stackoverflow
Inventor
Yukichi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50102169A priority Critical patent/JPS5226154A/ja
Publication of JPS5226154A publication Critical patent/JPS5226154A/ja
Publication of JPS5548428B2 publication Critical patent/JPS5548428B2/ja
Granted legal-status Critical Current

Links

JP50102169A 1975-08-25 1975-08-25 Scanning particles microscopes Granted JPS5226154A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50102169A JPS5226154A (en) 1975-08-25 1975-08-25 Scanning particles microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50102169A JPS5226154A (en) 1975-08-25 1975-08-25 Scanning particles microscopes

Publications (2)

Publication Number Publication Date
JPS5226154A true JPS5226154A (en) 1977-02-26
JPS5548428B2 JPS5548428B2 (enrdf_load_stackoverflow) 1980-12-05

Family

ID=14320193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50102169A Granted JPS5226154A (en) 1975-08-25 1975-08-25 Scanning particles microscopes

Country Status (1)

Country Link
JP (1) JPS5226154A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111274A (en) * 1978-02-20 1979-08-31 Jeol Ltd Scanning electron microscope
JPH09312142A (ja) * 1996-05-23 1997-12-02 Jeol Ltd 走査電子顕微鏡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718448U (enrdf_load_stackoverflow) * 1971-04-05 1972-11-01
JPS5212451U (enrdf_load_stackoverflow) * 1975-07-14 1977-01-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718448U (enrdf_load_stackoverflow) * 1971-04-05 1972-11-01
JPS5212451U (enrdf_load_stackoverflow) * 1975-07-14 1977-01-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111274A (en) * 1978-02-20 1979-08-31 Jeol Ltd Scanning electron microscope
JPH09312142A (ja) * 1996-05-23 1997-12-02 Jeol Ltd 走査電子顕微鏡

Also Published As

Publication number Publication date
JPS5548428B2 (enrdf_load_stackoverflow) 1980-12-05

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