JPS5225566A - Semiconductor manufacturing apparatus - Google Patents

Semiconductor manufacturing apparatus

Info

Publication number
JPS5225566A
JPS5225566A JP10117475A JP10117475A JPS5225566A JP S5225566 A JPS5225566 A JP S5225566A JP 10117475 A JP10117475 A JP 10117475A JP 10117475 A JP10117475 A JP 10117475A JP S5225566 A JPS5225566 A JP S5225566A
Authority
JP
Japan
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
constituting
seal
perform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10117475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5428262B2 (enExample
Inventor
Masaaki Sakuta
Toshio Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP10117475A priority Critical patent/JPS5225566A/ja
Publication of JPS5225566A publication Critical patent/JPS5225566A/ja
Publication of JPS5428262B2 publication Critical patent/JPS5428262B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10117475A 1975-08-22 1975-08-22 Semiconductor manufacturing apparatus Granted JPS5225566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10117475A JPS5225566A (en) 1975-08-22 1975-08-22 Semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10117475A JPS5225566A (en) 1975-08-22 1975-08-22 Semiconductor manufacturing apparatus

Publications (2)

Publication Number Publication Date
JPS5225566A true JPS5225566A (en) 1977-02-25
JPS5428262B2 JPS5428262B2 (enExample) 1979-09-14

Family

ID=14293633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10117475A Granted JPS5225566A (en) 1975-08-22 1975-08-22 Semiconductor manufacturing apparatus

Country Status (1)

Country Link
JP (1) JPS5225566A (enExample)

Also Published As

Publication number Publication date
JPS5428262B2 (enExample) 1979-09-14

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