JPS5223551B2 - - Google Patents

Info

Publication number
JPS5223551B2
JPS5223551B2 JP46074297A JP7429771A JPS5223551B2 JP S5223551 B2 JPS5223551 B2 JP S5223551B2 JP 46074297 A JP46074297 A JP 46074297A JP 7429771 A JP7429771 A JP 7429771A JP S5223551 B2 JPS5223551 B2 JP S5223551B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46074297A
Other languages
Japanese (ja)
Other versions
JPS4840381A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46074297A priority Critical patent/JPS5223551B2/ja
Publication of JPS4840381A publication Critical patent/JPS4840381A/ja
Publication of JPS5223551B2 publication Critical patent/JPS5223551B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP46074297A 1971-09-23 1971-09-23 Expired JPS5223551B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46074297A JPS5223551B2 (fr) 1971-09-23 1971-09-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46074297A JPS5223551B2 (fr) 1971-09-23 1971-09-23

Publications (2)

Publication Number Publication Date
JPS4840381A JPS4840381A (fr) 1973-06-13
JPS5223551B2 true JPS5223551B2 (fr) 1977-06-24

Family

ID=13543050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46074297A Expired JPS5223551B2 (fr) 1971-09-23 1971-09-23

Country Status (1)

Country Link
JP (1) JPS5223551B2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0520962Y2 (fr) * 1984-01-12 1993-05-31
US10948534B2 (en) 2017-08-28 2021-03-16 Teradyne, Inc. Automated test system employing robotics
US10983145B2 (en) 2018-04-24 2021-04-20 Teradyne, Inc. System for testing devices inside of carriers

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165844A (ja) * 1986-12-27 1988-07-09 Terumo Corp レジスト材料
JPS63165846A (ja) * 1986-12-27 1988-07-09 Terumo Corp レジスト材料の露光方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0520962Y2 (fr) * 1984-01-12 1993-05-31
US10948534B2 (en) 2017-08-28 2021-03-16 Teradyne, Inc. Automated test system employing robotics
US10983145B2 (en) 2018-04-24 2021-04-20 Teradyne, Inc. System for testing devices inside of carriers

Also Published As

Publication number Publication date
JPS4840381A (fr) 1973-06-13

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